@inproceedings{108d43e5b1cd46f9bda3b20b2f69d06d,
title = "All-polymer high-aspect-ratio spring with embedded electrode",
abstract = "In this report, we propose an all-polymer high-aspect-ratio (HAR) spring with embedded electrode for in-plane low-frequency transducers. Using the capillary effect, conductive polymer has been successfully introduced into inherent voids in HAR parylene springs. We also develop a novel valve structure to stop the surface-tension-driven liquid flow in order to electrically isolate different sets of electrodes that are mechanically connected. Resistance and robustness of the parylene spring with embedded electrode is also characterized.",
keywords = "Conductive polymer, Embedded electrode, Parylene HAR spring, Surface-tension-driven liquid",
author = "Yue Feng and Yuji Suzuki",
year = "2013",
doi = "10.1109/Transducers.2013.6627082",
language = "English",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "1569--1572",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}