Advances in femtosecond laser fabrication of microchannels

Hai Lung Tsai; Xue Liang Yan; Su Mei Wang; Bo Xia; Peng Jun Liu; Lan Jiang

Advances in femtosecond laser fabrication of microchannels

Hai Lung Tsai
, Xue Liang Yan^*
, Su Mei Wang
, Bo Xia
, Peng Jun Liu
, Lan Jiang

^*Corresponding author for this work

Missouri University of Science and Technology
Beijing Institute of Technology

Research output: Contribution to journal › Review article › peer-review

7 Citations (Scopus)

Abstract

Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microchannels are reviewed, especially for femtosecond laser irradiation followed by chemical etching and liquid-assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.

Original language	English
Pages (from-to)	991-1003
Number of pages	13
Journal	Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology
Volume	32
Issue number	10
Publication status	Published - Oct 2012
Externally published	Yes

Keywords

Femtosecond laser
Microchannel
Modification

Cite this

@article{1b20747f67ff4cd5abea348440bfce82,

title = "Advances in femtosecond laser fabrication of microchannels",

abstract = "Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microchannels are reviewed, especially for femtosecond laser irradiation followed by chemical etching and liquid-assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.",

keywords = "Femtosecond laser, Microchannel, Modification",

author = "Tsai, \{Hai Lung\} and Yan, \{Xue Liang\} and Wang, \{Su Mei\} and Bo Xia and Liu, \{Peng Jun\} and Lan Jiang",

year = "2012",

month = oct,

language = "English",

volume = "32",

pages = "991--1003",

journal = "Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology",

issn = "1001-0645",

publisher = "Beijing Institute of Technology",

number = "10",

}

TY - JOUR

T1 - Advances in femtosecond laser fabrication of microchannels

AU - Tsai, Hai Lung

AU - Yan, Xue Liang

AU - Wang, Su Mei

AU - Xia, Bo

AU - Liu, Peng Jun

AU - Jiang, Lan

PY - 2012/10

Y1 - 2012/10

N2 - Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microchannels are reviewed, especially for femtosecond laser irradiation followed by chemical etching and liquid-assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.

AB - Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microchannels are reviewed, especially for femtosecond laser irradiation followed by chemical etching and liquid-assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.

KW - Femtosecond laser

KW - Microchannel

KW - Modification

UR - https://www.scopus.com/pages/publications/84871889058

M3 - Review article

AN - SCOPUS:84871889058

SN - 1001-0645

VL - 32

SP - 991

EP - 1003

JO - Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology

JF - Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology

IS - 10

ER -

Advances in femtosecond laser fabrication of microchannels

Abstract

Keywords

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