@inproceedings{b4dac28392b1470cba51302838c9c7e8,
title = "Adaptive laser beam forming for laser shock micro-forming for 3D MEMS devices fabrication",
abstract = "Laser shock micro-forming is a non-thermal laser forming method that use laser-induced shockwave to modify surface properties and to adjust shapes and geometry of work pieces. In this paper, we present an adaptive optical technique to engineer spatial profiles of the laser beam to exert precision control on the laser shock forming process for free-standing MEMS structures. Using a spatial light modulator, on-target laser energy profiles are engineered to control shape, size, and deformation magnitude, which has led to significant improvement of the laser shock processing outcome at micrometer scales. The results presented in this paper show that the adaptive-optics laser beam forming is an effective method to improve both quality and throughput of the laser forming process at micrometer scales.",
keywords = "Laser shockwave generation, MEMS, adaptive optics, laser shock forming, spatial light modulator",
author = "Ran Zou and Shuliang Wang and Mohan Wang and Shuo Li and Sheng Huang and Yankun Lin and Chen, \{Kevin P.\}",
note = "Publisher Copyright: {\textcopyright} 2016 SPIE.; 6th Pacific Rim Laser Damage 2016: Optical Materials for High-Power Lasers, PLD 2016 ; Conference date: 18-05-2016 Through 20-05-2016",
year = "2016",
doi = "10.1117/12.2241123",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Takahisa Jitsuno and Wolfgang Rudolph and Jianda Shao",
booktitle = "Pacific Rim Laser Damage 2016",
address = "United States",
}