Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range

Clément Javerzac-Galy; Junqiu Liu; Arslan S. Raja; Tobias J. Kippenberg; Domenico De Fazio; Alisson Cadore; Ioannis Paradeisanos; Giancarlo Soavi; Gang Wang; Andrea C. Ferrari

doi:10.1364/FIO.2018.FW5E.5

Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range

Clément Javerzac-Galy
, Junqiu Liu
, Arslan S. Raja
, Tobias J. Kippenberg
, Domenico De Fazio
, Alisson Cadore
, Ioannis Paradeisanos
, Giancarlo Soavi
, Gang Wang
, Andrea C. Ferrari

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We present air-cladded silicon nitride microresonators at visible wavelengths compatible with 2D material transfer, fabricated using the photonic Damascene reflow process. Quality factors of 1 million have been measured at 765 nm.

Original language	English
Title of host publication	Frontiers in Optics, FIO 2018
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580460
DOIs	https://doi.org/10.1364/FIO.2018.FW5E.5
Publication status	Published - 2018
Externally published	Yes
Event	Frontiers in Optics, FIO 2018 - Washington, DC, United States Duration: 16 Sept 2018 → 20 Sept 2018

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F114-FIO 2018
ISSN (Electronic)	2162-2701

Conference

Conference	Frontiers in Optics, FIO 2018
Country/Territory	United States
City	Washington, DC
Period	16/09/18 → 20/09/18

Access to Document

10.1364/FIO.2018.FW5E.5

Cite this

Javerzac-Galy, C., Liu, J., Raja, A. S., Kippenberg, T. J., De Fazio, D., Cadore, A., Paradeisanos, I., Soavi, G., Wang, G., & Ferrari, A. C. (2018). Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range. In Frontiers in Optics, FIO 2018 (Optics InfoBase Conference Papers; Vol. Part F114-FIO 2018). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/FIO.2018.FW5E.5

@inproceedings{ebc22a17399643a885ed0900a0e2fbe4,

title = "Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range",

abstract = "We present air-cladded silicon nitride microresonators at visible wavelengths compatible with 2D material transfer, fabricated using the photonic Damascene reflow process. Quality factors of 1 million have been measured at 765 nm.",

author = "Cl{\'e}ment Javerzac-Galy and Junqiu Liu and Raja, \{Arslan S.\} and Kippenberg, \{Tobias J.\} and \{De Fazio\}, Domenico and Alisson Cadore and Ioannis Paradeisanos and Giancarlo Soavi and Gang Wang and Ferrari, \{Andrea C.\}",

note = "Publisher Copyright: {\textcopyright} 2018 The Author(s).; Frontiers in Optics, FIO 2018 ; Conference date: 16-09-2018 Through 20-09-2018",

year = "2018",

doi = "10.1364/FIO.2018.FW5E.5",

language = "English",

isbn = "9781943580460",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Frontiers in Optics, FIO 2018",

address = "United States",

}

Javerzac-Galy, C, Liu, J, Raja, AS, Kippenberg, TJ, De Fazio, D, Cadore, A, Paradeisanos, I, Soavi, G, Wang, G & Ferrari, AC 2018, Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range. in Frontiers in Optics, FIO 2018. Optics InfoBase Conference Papers, vol. Part F114-FIO 2018, Optica Publishing Group (formerly OSA), Frontiers in Optics, FIO 2018, Washington, DC, United States, 16/09/18. https://doi.org/10.1364/FIO.2018.FW5E.5

Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range. / Javerzac-Galy, Clément; Liu, Junqiu; Raja, Arslan S. et al.
Frontiers in Optics, FIO 2018. Optica Publishing Group (formerly OSA), 2018. (Optics InfoBase Conference Papers; Vol. Part F114-FIO 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range

AU - Javerzac-Galy, Clément

AU - Liu, Junqiu

AU - Raja, Arslan S.

AU - Kippenberg, Tobias J.

AU - De Fazio, Domenico

AU - Cadore, Alisson

AU - Paradeisanos, Ioannis

AU - Soavi, Giancarlo

AU - Wang, Gang

AU - Ferrari, Andrea C.

PY - 2018

Y1 - 2018

N2 - We present air-cladded silicon nitride microresonators at visible wavelengths compatible with 2D material transfer, fabricated using the photonic Damascene reflow process. Quality factors of 1 million have been measured at 765 nm.

AB - We present air-cladded silicon nitride microresonators at visible wavelengths compatible with 2D material transfer, fabricated using the photonic Damascene reflow process. Quality factors of 1 million have been measured at 765 nm.

UR - https://www.scopus.com/pages/publications/85059388094

U2 - 10.1364/FIO.2018.FW5E.5

DO - 10.1364/FIO.2018.FW5E.5

M3 - Conference contribution

AN - SCOPUS:85059388094

SN - 9781943580460

T3 - Optics InfoBase Conference Papers

BT - Frontiers in Optics, FIO 2018

PB - Optica Publishing Group (formerly OSA)

T2 - Frontiers in Optics, FIO 2018

Y2 - 16 September 2018 through 20 September 2018

ER -

Active photonic integrated circuits combining Si3N4 microresonators with 2D materials for applications in the visible wavelength range

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