Abstract
Based on the generalized theory of wide electron beam focusing, an aberration theory for wide electron beam focusing with curvilineal optical axis in electrostatic and magnetic imaging systems has been studied using the rotational and non-orthogonal curvilineal coordinate systems. By defining the integration function, all aberration coefficients of the second-order geometrical aberration, the principal trajectory chromatic aberration and curvilineal paraxial trajectory chromatic aberration are given. The results of this paper have been shown to be convenient for analysis and computer processing.
| Original language | English |
|---|---|
| Pages (from-to) | 271-277 |
| Number of pages | 7 |
| Journal | Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology |
| Volume | 15 |
| Issue number | 3 |
| Publication status | Published - 1995 |
Keywords
- Aberration
- Curvili- neal coordinates/cathode lenses
- Electromagnetic lenses
- Electron focusing
- Electron optics
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