TY - JOUR
T1 - A Wideband and Wire-Bonding-Free Packaging Concept for Sub-Terahertz Active Devices
AU - Gao, Gang
AU - Zhou, Ziqiao
AU - Li, Haolin
AU - Li, Zhiqiang
AU - Yu, Weihua
N1 - Publisher Copyright:
© 1980-2012 IEEE.
PY - 2025
Y1 - 2025
N2 - This letter proposes a novel wire-bonding-free packaging concept for sub-terahertz (sub-THz) active devices. The approach utilizes a quartz substrate with metal strips patterned on its bottom surface, termed flip-quartz, to achieve direct and broadband interconnection between the chip and planar transmission line. By eliminating traditional wire-bonding, the design significantly reduces parasitic effects and radiation losses, which are critical at sub-THz frequencies. To demonstrate the feasibility, a D-band (110-170 GHz) power amplifier (PA) module was designed, fabricated, and experimentally tested. The measured results exhibit good agreement with on-wafer measurements. Across the entire D-band, the measured small-signal gain is greater than 19 dB, the saturated output power exceeds 17 dBm, and the calculated average insertion loss remains below 1.2 dB. These results establish the proposed packaging concept as a promising solution for future sub-THz applications.
AB - This letter proposes a novel wire-bonding-free packaging concept for sub-terahertz (sub-THz) active devices. The approach utilizes a quartz substrate with metal strips patterned on its bottom surface, termed flip-quartz, to achieve direct and broadband interconnection between the chip and planar transmission line. By eliminating traditional wire-bonding, the design significantly reduces parasitic effects and radiation losses, which are critical at sub-THz frequencies. To demonstrate the feasibility, a D-band (110-170 GHz) power amplifier (PA) module was designed, fabricated, and experimentally tested. The measured results exhibit good agreement with on-wafer measurements. Across the entire D-band, the measured small-signal gain is greater than 19 dB, the saturated output power exceeds 17 dBm, and the calculated average insertion loss remains below 1.2 dB. These results establish the proposed packaging concept as a promising solution for future sub-THz applications.
KW - Active device packaging
KW - broadband
KW - chip interconnection
KW - flip-quartz
KW - sub-THz
KW - wire-bonding-free
UR - https://www.scopus.com/pages/publications/105013218162
U2 - 10.1109/LED.2025.3598817
DO - 10.1109/LED.2025.3598817
M3 - Article
AN - SCOPUS:105013218162
SN - 0741-3106
VL - 46
SP - 1833
EP - 1836
JO - IEEE Electron Device Letters
JF - IEEE Electron Device Letters
IS - 10
ER -