@inproceedings{e288e542744e4dae9a58a20097f060a6,
title = "A tunable microlens with 0.9 mm scan range and small lateral shift",
abstract = "We report an electrothermally-actuated microlens scanner suitable for biomedical imaging applications. Large vertical actuation range of ∼0.9 mm with small lateral shift (< 7 μm) and tilting (< 0.38°) is demonstrated for assembled glass lenses.",
keywords = "Biomedical imaging, Electrothermal bimorph, Large vertical displacement, Lateral shift free, Tunable microlens",
author = "Lei Wu and Huikai Xie",
year = "2009",
doi = "10.1109/OMEMS.2009.5338591",
language = "English",
isbn = "9781424423828",
series = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",
pages = "69--70",
booktitle = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009",
note = "2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009 ; Conference date: 17-08-2009 Through 20-08-2009",
}