A tunable microlens scanner with large-vertical-displacement actuation

Ankur Jain; Huikai Xie

A tunable microlens scanner with large-vertical-displacement actuation

Ankur Jain^*
, Huikai Xie

^*Corresponding author for this work

University of Florida

Research output: Contribution to journal › Conference article › peer-review

5 Citations (Scopus)

Abstract

We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 μm diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 μm is achieved with a 700 μm-by-320 μm LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 μ, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.

Original language	English
Article number	MP10
Pages (from-to)	92-95
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Publication status	Published - 2005
Externally published	Yes
Event	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: 30 Jan 2005 → 3 Feb 2005

Cite this

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title = "A tunable microlens scanner with large-vertical-displacement actuation",

abstract = "We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 μm diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 μm is achieved with a 700 μm-by-320 μm LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 μ, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.",

author = "Ankur Jain and Huikai Xie",

year = "2005",

language = "English",

pages = "92--95",

journal = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

issn = "1084-6999",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami ; Conference date: 30-01-2005 Through 03-02-2005",

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TY - JOUR

T1 - A tunable microlens scanner with large-vertical-displacement actuation

AU - Jain, Ankur

AU - Xie, Huikai

PY - 2005

Y1 - 2005

N2 - We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 μm diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 μm is achieved with a 700 μm-by-320 μm LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 μ, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.

AB - We report the design, fabrication and operation of a tunable microlens that can perform large vertical scans at low actuation voltages. Photoresist reflow technique was used to form a 210 μm diameter microlens on a lens holder that is integrated with a large-vertical-displacement (LVD) microactuator. The lens holder is fabricated using a unique DRIE CMOS-MEMS process. A maximum vertical displacement of 280 μm is achieved with a 700 μm-by-320 μm LVD device at an actuation voltage of 10 V. The microlens has a focal length of 188 μ, a numerical aperture of 0.35, and a resonant frequency of about 1 kHz.

UR - https://www.scopus.com/pages/publications/26844559805

M3 - Conference article

AN - SCOPUS:26844559805

SN - 1084-6999

SP - 92

EP - 95

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

M1 - MP10

T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami

Y2 - 30 January 2005 through 3 February 2005

ER -

A tunable microlens scanner with large-vertical-displacement actuation

Abstract

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