@inproceedings{6c140754723740ffa50032f17dd27762,
title = "A tip-tilt-piston piezoelectric scanning micromirror with folded PZT unimorph actuators",
abstract = "This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror actuated by an array of folded piezoelectric unimorph actuators. The micromirror can perform rotational scanning around two in-plane orthogonal axes as well as out-of-plane piston motion The measured resonant frequencies are 112Hz (piston), 346Hz (along x-axis rotation), 1.38kHz (along y-axis rotation) and 4.87kHz (torsional rotation), respectively. The chip size is 4.3mm×2.5mm and the mirror plate is 1.0mm×1.5mm.",
keywords = "MEMS, Micromirror, PZT, PZT Actuators, Piezoelectric, Resonance Scanning, TTP",
author = "W. Liao and W. Liu and Rogers, \{J. E.\} and Y. Tang and Wang, \{B. P.\} and H. Xie",
year = "2013",
doi = "10.1109/Transducers.2013.6626819",
language = "English",
isbn = "9781467359818",
series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",
pages = "526--529",
booktitle = "2013 Transducers and Eurosensors XXVII",
note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",
}