@inproceedings{f108540f53bc45c7ae191fac0bd78c4c,
title = "A Tip-Tilt-Piston Piezoelectric Micromirror with a Double-S Shaped Unimorph Sputtered PZT Structure",
abstract = "The design, fabrication and characterization of a tip-tilt-piston (TTP) piezoelectric micromirror with a 1 mm2 optical aperture is presented. The TTP piezoelectric micromirror consists of four symmetrically distributed double-S shaped unimorph piezoelectric actuators made of sputtered PZT films. Measurements show that the frequencies for the tip, tilt and piston modes are 6.21 kHz, 6.12 kHz and 3.51 kHz, respectively. A piston displacement of 5 μm is also reached under 50 Vdc, and an optical scan angle up to 16° is obtained at resonance with a driving voltage amplitude of 30 V.",
keywords = "Double-S actuator, Piezoelectric micromirror, PZT, TTP micromirror",
author = "Ke Cao and Qingcheng Zheng and Bo Xie and Ning Deng and Hui Shang and Hui Zhao and Yao Lu and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 ; Conference date: 19-01-2025 Through 23-01-2025",
year = "2025",
doi = "10.1109/MEMS61431.2025.10918169",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1117--1120",
booktitle = "2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025",
address = "United States",
}