A single-crystal silicon micromirror for large bi-directional 2D scanning applications

Ankur Jain; Huikai Xie

doi:10.1016/j.sna.2005.10.030

A single-crystal silicon micromirror for large bi-directional 2D scanning applications

Ankur Jain^*
, Huikai Xie

^*Corresponding author for this work

University of Florida

Research output: Contribution to journal › Article › peer-review

47 Citations (Scopus)

Abstract

This paper reports the design, fabrication and operation of a two-dimensional (2D) micromirror that can generate large bi-directional scans at low actuation voltages. This single-crystal silicon (SCS) micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and SCS microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bi-directional 2D optical scans (over ±30°) at less than 12 V dc. 2D dynamic scanning using this mirror has been demonstrated by obtaining a 14° × 50° angular raster scan pattern. This device can also perform vertical displacements up to 0.5 mm at about 15 V dc.

Original language	English
Pages (from-to)	454-460
Number of pages	7
Journal	Sensors and Actuators A: Physical
Volume	130-131
Issue number	SPEC. ISS.
DOIs	https://doi.org/10.1016/j.sna.2005.10.030
Publication status	Published - 14 Aug 2006
Externally published	Yes

Keywords

Bi-directional scanning
Electrothermal actuation
Large rotation angle
Large vertical displacement
Optical scanner
Two-dimensional (2D) micromirror

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10.1016/j.sna.2005.10.030

Cite this

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title = "A single-crystal silicon micromirror for large bi-directional 2D scanning applications",

abstract = "This paper reports the design, fabrication and operation of a two-dimensional (2D) micromirror that can generate large bi-directional scans at low actuation voltages. This single-crystal silicon (SCS) micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and SCS microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bi-directional 2D optical scans (over ±30°) at less than 12 V dc. 2D dynamic scanning using this mirror has been demonstrated by obtaining a 14° × 50° angular raster scan pattern. This device can also perform vertical displacements up to 0.5 mm at about 15 V dc.",

keywords = "Bi-directional scanning, Electrothermal actuation, Large rotation angle, Large vertical displacement, Optical scanner, Two-dimensional (2D) micromirror",

author = "Ankur Jain and Huikai Xie",

year = "2006",

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doi = "10.1016/j.sna.2005.10.030",

language = "English",

volume = "130-131",

pages = "454--460",

journal = "Sensors and Actuators A: Physical",

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TY - JOUR

T1 - A single-crystal silicon micromirror for large bi-directional 2D scanning applications

AU - Jain, Ankur

AU - Xie, Huikai

PY - 2006/8/14

Y1 - 2006/8/14

N2 - This paper reports the design, fabrication and operation of a two-dimensional (2D) micromirror that can generate large bi-directional scans at low actuation voltages. This single-crystal silicon (SCS) micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and SCS microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bi-directional 2D optical scans (over ±30°) at less than 12 V dc. 2D dynamic scanning using this mirror has been demonstrated by obtaining a 14° × 50° angular raster scan pattern. This device can also perform vertical displacements up to 0.5 mm at about 15 V dc.

AB - This paper reports the design, fabrication and operation of a two-dimensional (2D) micromirror that can generate large bi-directional scans at low actuation voltages. This single-crystal silicon (SCS) micromirror device has been fabricated by using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and SCS microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bi-directional 2D optical scans (over ±30°) at less than 12 V dc. 2D dynamic scanning using this mirror has been demonstrated by obtaining a 14° × 50° angular raster scan pattern. This device can also perform vertical displacements up to 0.5 mm at about 15 V dc.

KW - Bi-directional scanning

KW - Electrothermal actuation

KW - Large rotation angle

KW - Large vertical displacement

KW - Optical scanner

KW - Two-dimensional (2D) micromirror

UR - https://www.scopus.com/pages/publications/33745859351

U2 - 10.1016/j.sna.2005.10.030

DO - 10.1016/j.sna.2005.10.030

M3 - Article

AN - SCOPUS:33745859351

SN - 0924-4247

VL - 130-131

SP - 454

EP - 460

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - SPEC. ISS.

ER -

A single-crystal silicon micromirror for large bi-directional 2D scanning applications

Abstract

Keywords

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