@inproceedings{56fc69f6354349b4905f49a2f70976e1,
title = "A Robust Electrothermal Micromirror Based on Photosensitive Polyimide (PSPI) - Al Bimorphs",
abstract = "In this paper, a high-impact resistive lateral-shift-free (LSF) electrothermal micromirror is proposed. The new bimorphs of the micromirror are composed of photosensitive polyimide (PSPI) and Al. Compared with the traditional micromirror, the impact resistance has been improved about 30 times.",
keywords = "Bimorph, Electrothermal actuator, High impact resistance, MEMS, Micromirror, PSPI",
author = "Hengzhang Yang and Qiangqiang Liu and Anrun Ren and Teng Pan and Yingtao Ding and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024 ; Conference date: 28-07-2024 Through 01-08-2024",
year = "2024",
doi = "10.1109/OMN61224.2024.10685269",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024",
address = "United States",
}