A Robust Electrothermal Micromirror Array based on Polyimide/Al Bimorphs

Hengzhang Yang; Qiangqiang Liu; Jihui Ni; Wenlong Jiao; Xiaodan Mao; Yingtao Ding; Anrun Ren; Hui Zhao; Shuailong Zhang; Huikai Xie

doi:10.1109/MEMS61431.2025.10918047

A Robust Electrothermal Micromirror Array based on Polyimide/Al Bimorphs

Hengzhang Yang, Qiangqiang Liu, Jihui Ni, Wenlong Jiao, Xiaodan Mao, Yingtao Ding, Anrun Ren, Hui Zhao, Shuailong Zhang^*, Huikai Xie^*

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

MEMS micromirrors are fragile and require careful handling to work in harsh environments and survive accidental falls or external impacts, which is especially critical for micromirror arrays, where multiple units must work jointly. This paper presents a robust 4 × 4 electrothermal micromirror array, constructed with bimorph beams made of Al and photosensitive polyimide (PSPI). The low Young's modulus of PSPI combined with the high ductility of Al enables this micromirror array to withstand impacts exceeding 1600 g. Additionally, this micromirror array demonstrates exceptional tip-tilt-piston scanning capabilities, positioning it as a promising candidate for applications in optical phased array modulation and optical cross-connect.

Original language	English
Title of host publication	2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	724-727
Number of pages	4
ISBN (Electronic)	9798331508890
DOIs	https://doi.org/10.1109/MEMS61431.2025.10918047
Publication status	Published - 2025
Externally published	Yes
Event	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 - Kaohsiung, Taiwan, Province of China Duration: 19 Jan 2025 → 23 Jan 2025

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025
Country/Territory	Taiwan, Province of China
City	Kaohsiung
Period	19/01/25 → 23/01/25

Keywords

Electrothermal Actuation
Electrothermal Bimorph
MEMS
Micromirror Array
Photosensitive Polyimide

Access to Document

10.1109/MEMS61431.2025.10918047

Cite this

Yang, H., Liu, Q., Ni, J., Jiao, W., Mao, X., Ding, Y., Ren, A., Zhao, H., Zhang, S., & Xie, H. (2025). A Robust Electrothermal Micromirror Array based on Polyimide/Al Bimorphs. In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025 (pp. 724-727). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS61431.2025.10918047

Yang, Hengzhang ; Liu, Qiangqiang ; Ni, Jihui et al. / A Robust Electrothermal Micromirror Array based on Polyimide/Al Bimorphs. 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. pp. 724-727 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{9c5193cf1bce443da470335799903b4d,

title = "A Robust Electrothermal Micromirror Array based on Polyimide/Al Bimorphs",

abstract = "MEMS micromirrors are fragile and require careful handling to work in harsh environments and survive accidental falls or external impacts, which is especially critical for micromirror arrays, where multiple units must work jointly. This paper presents a robust 4 × 4 electrothermal micromirror array, constructed with bimorph beams made of Al and photosensitive polyimide (PSPI). The low Young's modulus of PSPI combined with the high ductility of Al enables this micromirror array to withstand impacts exceeding 1600 g. Additionally, this micromirror array demonstrates exceptional tip-tilt-piston scanning capabilities, positioning it as a promising candidate for applications in optical phased array modulation and optical cross-connect.",

keywords = "Electrothermal Actuation, Electrothermal Bimorph, MEMS, Micromirror Array, Photosensitive Polyimide",

author = "Hengzhang Yang and Qiangqiang Liu and Jihui Ni and Wenlong Jiao and Xiaodan Mao and Yingtao Ding and Anrun Ren and Hui Zhao and Shuailong Zhang and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 ; Conference date: 19-01-2025 Through 23-01-2025",

year = "2025",

doi = "10.1109/MEMS61431.2025.10918047",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "724--727",

booktitle = "2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025",

address = "United States",

}

Yang, H, Liu, Q, Ni, J, Jiao, W, Mao, X, Ding, Y, Ren, A, Zhao, H, Zhang, S & Xie, H 2025, A Robust Electrothermal Micromirror Array based on Polyimide/Al Bimorphs. in 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 724-727, 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025, Kaohsiung, Taiwan, Province of China, 19/01/25. https://doi.org/10.1109/MEMS61431.2025.10918047

A Robust Electrothermal Micromirror Array based on Polyimide/Al Bimorphs. / Yang, Hengzhang; Liu, Qiangqiang; Ni, Jihui et al.
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. p. 724-727 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A Robust Electrothermal Micromirror Array based on Polyimide/Al Bimorphs

AU - Yang, Hengzhang

AU - Liu, Qiangqiang

AU - Ni, Jihui

AU - Jiao, Wenlong

AU - Mao, Xiaodan

AU - Ding, Yingtao

AU - Ren, Anrun

AU - Zhao, Hui

AU - Zhang, Shuailong

AU - Xie, Huikai

PY - 2025

Y1 - 2025

N2 - MEMS micromirrors are fragile and require careful handling to work in harsh environments and survive accidental falls or external impacts, which is especially critical for micromirror arrays, where multiple units must work jointly. This paper presents a robust 4 × 4 electrothermal micromirror array, constructed with bimorph beams made of Al and photosensitive polyimide (PSPI). The low Young's modulus of PSPI combined with the high ductility of Al enables this micromirror array to withstand impacts exceeding 1600 g. Additionally, this micromirror array demonstrates exceptional tip-tilt-piston scanning capabilities, positioning it as a promising candidate for applications in optical phased array modulation and optical cross-connect.

AB - MEMS micromirrors are fragile and require careful handling to work in harsh environments and survive accidental falls or external impacts, which is especially critical for micromirror arrays, where multiple units must work jointly. This paper presents a robust 4 × 4 electrothermal micromirror array, constructed with bimorph beams made of Al and photosensitive polyimide (PSPI). The low Young's modulus of PSPI combined with the high ductility of Al enables this micromirror array to withstand impacts exceeding 1600 g. Additionally, this micromirror array demonstrates exceptional tip-tilt-piston scanning capabilities, positioning it as a promising candidate for applications in optical phased array modulation and optical cross-connect.

KW - Electrothermal Actuation

KW - Electrothermal Bimorph

KW - MEMS

KW - Micromirror Array

KW - Photosensitive Polyimide

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025

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ER -

Yang H, Liu Q, Ni J, Jiao W, Mao X, Ding Y et al. A Robust Electrothermal Micromirror Array based on Polyimide/Al Bimorphs. In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc. 2025. p. 724-727. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS61431.2025.10918047

A Robust Electrothermal Micromirror Array based on Polyimide/Al Bimorphs

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Keywords

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