@inproceedings{9f3d7afca6eb4ecb82231372198f73e7,
title = "A Piezoelectric Micromirror with Large Scanning Angle Based on Single-Crystal PZT",
abstract = "This paper presents a piezoelectric micromirror capable of large 2-axis angular scanning by integrating Zshaped piezoelectric actuators composed of a 2.18 μ m thick single-crystal PZT layer. The incorporation of singlecrystal PZT not only increases the responsivity of the micromirror but also significantly reduces the residual stresses. The fabricated device has a 3 mm-diameter mirror plate and achieves the maximum quasi-static optical scanning angles of ± 15.0° and ± 24.2° along its two orthogonal axes. The first two resonant frequencies are 242 Hz and 405 Hz, respectively. The radius of curvature of the mirror can reach up to 66 cm.",
keywords = "MEMS micromirror, Piezoelectric, Single-crystal PZT, Z-shaped actuator",
author = "Ke Cao and Qingcheng Zheng and Hao Chen and Hui Shang and Chenyu Bai and Yulang Chen and Xudong Ma and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026 ; Conference date: 25-01-2026 Through 29-01-2026",
year = "2026",
doi = "10.1109/MEMS64181.2026.11419308",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1387--1389",
booktitle = "2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026",
address = "United States",
}