A Novel Chip-Based Terahertz Power Sensor and an Accurate Microcalorimeter System in the 140-220 GHz

This article proposes a novel chip-based terahertz power sensor with a small size (<8 cm) in a broad frequency range of 140∼ 220 GHz and an accurate microcalorimeter system with measurement uncertainty of 1.8%~3.9% (k =2 ). The work begins with a specific design of a multilayer chip used for the direct current (dc) substitution method. A small and stable terahertz power sensor is developed based on this multilayer chip. Then, a microcalorimeter system and its rigorous calibration process are presented in detail. Finally, a contrast experiment demonstrates that the proposed power sensor is feasible to measure terahertz power in a broadband of 140∼ 220 GHz.