A new structure of cantilever-based infrared focal-plane array

Xin Wang, Xiaomei Yu, Ting Li, Ming Liu, Xiaohua Liu, Yuejin Zhao

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presents the design, fabrication and analysis of an infrared focal-plane array (FPA) consisting of bi-material cantilevers. The bi-material cantilevers are made of silicon nitride (SiNx) and aluminum (Al), and which will bend as the temperature changes due to the difference of the two materials in thermal expansion coefficients. In order to enhance the infrared (IR) absorption efficiency of the FPA, deep reactive ion etching (DRIE) technique was introduced to remove the backside Si of the structures. Therefore the IR light can reach the FPA directly. The thermomechanical sensitivity for the finished FPA is measured to be 0.134μm/K by profile meter, and the noise-equivalent temperature difference (NETD) of the system was estimated to be 18mK.

Original languageEnglish
Title of host publicationProceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007
Pages425-429
Number of pages5
DOIs
Publication statusPublished - 2007
EventInternational Conference on Integration and Commercialization of Micro and Nanosystems 2007 - Sanya, Hainan, China
Duration: 10 Jan 200713 Jan 2007

Publication series

NameProceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007
VolumeA

Conference

ConferenceInternational Conference on Integration and Commercialization of Micro and Nanosystems 2007
Country/TerritoryChina
CitySanya, Hainan
Period10/01/0713/01/07

Keywords

  • Bi-material
  • Cantilever
  • FPA
  • Uncooled

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