A new structure of cantilever-based infrared focal-plane array

Xin Wang; Xiaomei Yu; Ting Li; Ming Liu; Xiaohua Liu; Yuejin Zhao

doi:10.1115/MNC2007-21201

A new structure of cantilever-based infrared focal-plane array

Xin Wang, Xiaomei Yu, Ting Li, Ming Liu, Xiaohua Liu, Yuejin Zhao

School of Optics and Photonics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper presents the design, fabrication and analysis of an infrared focal-plane array (FPA) consisting of bi-material cantilevers. The bi-material cantilevers are made of silicon nitride (SiNx) and aluminum (Al), and which will bend as the temperature changes due to the difference of the two materials in thermal expansion coefficients. In order to enhance the infrared (IR) absorption efficiency of the FPA, deep reactive ion etching (DRIE) technique was introduced to remove the backside Si of the structures. Therefore the IR light can reach the FPA directly. The thermomechanical sensitivity for the finished FPA is measured to be 0.134μm/K by profile meter, and the noise-equivalent temperature difference (NETD) of the system was estimated to be 18mK.

Original language	English
Title of host publication	Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007
Pages	425-429
Number of pages	5
DOIs	https://doi.org/10.1115/MNC2007-21201
Publication status	Published - 2007
Event	International Conference on Integration and Commercialization of Micro and Nanosystems 2007 - Sanya, Hainan, China Duration: 10 Jan 2007 → 13 Jan 2007

Publication series

Name	Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007
Volume	A

Conference

Conference	International Conference on Integration and Commercialization of Micro and Nanosystems 2007
Country/Territory	China
City	Sanya, Hainan
Period	10/01/07 → 13/01/07

Keywords

Bi-material
Cantilever
FPA
Uncooled

Access to Document

10.1115/MNC2007-21201

Cite this

Wang, X., Yu, X., Li, T., Liu, M., Liu, X., & Zhao, Y. (2007). A new structure of cantilever-based infrared focal-plane array. In Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007 (pp. 425-429). (Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007; Vol. A). https://doi.org/10.1115/MNC2007-21201

@inproceedings{62d9560b72bc4cd59db35a5e94de1be3,

title = "A new structure of cantilever-based infrared focal-plane array",

abstract = "This paper presents the design, fabrication and analysis of an infrared focal-plane array (FPA) consisting of bi-material cantilevers. The bi-material cantilevers are made of silicon nitride (SiNx) and aluminum (Al), and which will bend as the temperature changes due to the difference of the two materials in thermal expansion coefficients. In order to enhance the infrared (IR) absorption efficiency of the FPA, deep reactive ion etching (DRIE) technique was introduced to remove the backside Si of the structures. Therefore the IR light can reach the FPA directly. The thermomechanical sensitivity for the finished FPA is measured to be 0.134μm/K by profile meter, and the noise-equivalent temperature difference (NETD) of the system was estimated to be 18mK.",

keywords = "Bi-material, Cantilever, FPA, Uncooled",

author = "Xin Wang and Xiaomei Yu and Ting Li and Ming Liu and Xiaohua Liu and Yuejin Zhao",

year = "2007",

doi = "10.1115/MNC2007-21201",

language = "English",

isbn = "0791842657",

series = "Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007",

pages = "425--429",

booktitle = "Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007",

note = "International Conference on Integration and Commercialization of Micro and Nanosystems 2007 ; Conference date: 10-01-2007 Through 13-01-2007",

}

Wang, X, Yu, X, Li, T, Liu, M, Liu, X & Zhao, Y 2007, A new structure of cantilever-based infrared focal-plane array. in Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007. Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007, vol. A, pp. 425-429, International Conference on Integration and Commercialization of Micro and Nanosystems 2007, Sanya, Hainan, China, 10/01/07. https://doi.org/10.1115/MNC2007-21201

A new structure of cantilever-based infrared focal-plane array. / Wang, Xin; Yu, Xiaomei; Li, Ting et al.
Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007. 2007. p. 425-429 (Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007; Vol. A).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A new structure of cantilever-based infrared focal-plane array

AU - Wang, Xin

AU - Yu, Xiaomei

AU - Li, Ting

AU - Liu, Ming

AU - Liu, Xiaohua

AU - Zhao, Yuejin

PY - 2007

Y1 - 2007

N2 - This paper presents the design, fabrication and analysis of an infrared focal-plane array (FPA) consisting of bi-material cantilevers. The bi-material cantilevers are made of silicon nitride (SiNx) and aluminum (Al), and which will bend as the temperature changes due to the difference of the two materials in thermal expansion coefficients. In order to enhance the infrared (IR) absorption efficiency of the FPA, deep reactive ion etching (DRIE) technique was introduced to remove the backside Si of the structures. Therefore the IR light can reach the FPA directly. The thermomechanical sensitivity for the finished FPA is measured to be 0.134μm/K by profile meter, and the noise-equivalent temperature difference (NETD) of the system was estimated to be 18mK.

AB - This paper presents the design, fabrication and analysis of an infrared focal-plane array (FPA) consisting of bi-material cantilevers. The bi-material cantilevers are made of silicon nitride (SiNx) and aluminum (Al), and which will bend as the temperature changes due to the difference of the two materials in thermal expansion coefficients. In order to enhance the infrared (IR) absorption efficiency of the FPA, deep reactive ion etching (DRIE) technique was introduced to remove the backside Si of the structures. Therefore the IR light can reach the FPA directly. The thermomechanical sensitivity for the finished FPA is measured to be 0.134μm/K by profile meter, and the noise-equivalent temperature difference (NETD) of the system was estimated to be 18mK.

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KW - Cantilever

KW - FPA

KW - Uncooled

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M3 - Conference contribution

AN - SCOPUS:34547928098

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SN - 9780791842652

T3 - Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007

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BT - Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007

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Wang X, Yu X, Li T, Liu M, Liu X, Zhao Y. A new structure of cantilever-based infrared focal-plane array. In Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007. 2007. p. 425-429. (Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007). doi: 10.1115/MNC2007-21201

A new structure of cantilever-based infrared focal-plane array

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