@inproceedings{db5f5895a529456aa8a089f441c9a8f1,
title = "A Monolithic Michelson interferometer with a large piston MEMS micromirror",
abstract = "We demonstrated a MEMS based Monolithic Michelson interferometer with both the movable mirror and fixed mirror vertically oriented and integrated on a silicon bench for the first time. Both mirrors are single-crystal silicon based and their vertical orientation is attained by a proper thermal bimorph design and a unique stopper mechanism. This device enables miniature Fourier transform spectrometers.",
keywords = "Electrothermal, MEMS, Michelson Interferometer, Micro mirror, Monolithic",
author = "W. Wang and J. Chen and Tanguy, \{Q. A.\} and H. Xie",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 ; Conference date: 31-07-2016 Through 04-08-2016",
year = "2016",
month = sep,
day = "13",
doi = "10.1109/OMN.2016.7565818",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings",
address = "United States",
}