TY - GEN
T1 - A monolithic cmos-mems 3-axis accelerometer with a low-noise, low-power dual-chopper amplifier
AU - Qu, Hongwei
AU - Fang, Deyou
AU - Xie, Huikai
N1 - Publisher Copyright:
© 2006 TRF.
PY - 2006
Y1 - 2006
N2 - This paper reports the process development, interface circuit design and device characterization of a monolithically integrated 3-axis capacitive accelerometer with a single proof mass. An improved DRIE post-CMOS MEMS process has been developed, which provides robust single-crystal silicon structures in all three axes and greatly reduces undercut of comb fingers in dry release. A low-noise, low-power, dual–chopper amplifier is designed for each axis, which consumes only 1 mW power. With a 40dB on-chip amplification, the measured sensitivities of the lateral-and z-axis accelerometers are 560 mV/g and 320 mV/g, respectively, which can be decreased by simply decreasing the amplitude of the modulation signal. The over-all noise floors of the lateral-and z-axis are 12 μg/√Hz and 110 μg/√Hz, respectively when tested around 200 Hz.
AB - This paper reports the process development, interface circuit design and device characterization of a monolithically integrated 3-axis capacitive accelerometer with a single proof mass. An improved DRIE post-CMOS MEMS process has been developed, which provides robust single-crystal silicon structures in all three axes and greatly reduces undercut of comb fingers in dry release. A low-noise, low-power, dual–chopper amplifier is designed for each axis, which consumes only 1 mW power. With a 40dB on-chip amplification, the measured sensitivities of the lateral-and z-axis accelerometers are 560 mV/g and 320 mV/g, respectively, which can be decreased by simply decreasing the amplitude of the modulation signal. The over-all noise floors of the lateral-and z-axis are 12 μg/√Hz and 110 μg/√Hz, respectively when tested around 200 Hz.
UR - https://www.scopus.com/pages/publications/34948883421
M3 - Conference contribution
AN - SCOPUS:34948883421
T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
SP - 224
EP - 227
BT - 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
A2 - Kenny, Thomas W.
A2 - Spangler, Leland
PB - Transducer Research Foundation
T2 - 13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
Y2 - 4 June 2006 through 8 June 2006
ER -