A millimeter-tunable-range microlens for endoscopic biomedical imaging applications

Lei Wu; Huikai Xie

doi:10.1109/JQE.2010.2048304

A millimeter-tunable-range microlens for endoscopic biomedical imaging applications

Lei Wu^*, Huikai Xie

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

29 Citations (Scopus)

Abstract

We report an electrothermally-actuated microlens scanner that is suitable for biomedical imaging applications. The microlens has a large tunable range and a low driving voltage, and the lens is made of glass. The enabling device is a new electrothermal actuator design that is capable of large vertical actuation (∼0.9mm) on a 3 mm device footprint, with small lateral shift (<7μm) and tilting (<0.38°) at less than 4-V. The design, fabrication and characterization of the actuator are presented. Imaging results by the assembled microlens are also demonstrated.

Original language	English
Article number	5518513
Pages (from-to)	1237-1244
Number of pages	8
Journal	IEEE Journal of Quantum Electronics
Volume	46
Issue number	9
DOIs	https://doi.org/10.1109/JQE.2010.2048304
Publication status	Published - 2010
Externally published	Yes

Keywords

Confocal microscopy
electrothermal bimorph
large vertical displacement
lateral shift free
optical coherence microscopy
tunable microlens

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10.1109/JQE.2010.2048304

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abstract = "We report an electrothermally-actuated microlens scanner that is suitable for biomedical imaging applications. The microlens has a large tunable range and a low driving voltage, and the lens is made of glass. The enabling device is a new electrothermal actuator design that is capable of large vertical actuation (∼0.9mm) on a 3 mm device footprint, with small lateral shift (<7μm) and tilting (<0.38°) at less than 4-V. The design, fabrication and characterization of the actuator are presented. Imaging results by the assembled microlens are also demonstrated.",

keywords = "Confocal microscopy, electrothermal bimorph, large vertical displacement, lateral shift free, optical coherence microscopy, tunable microlens",

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AU - Xie, Huikai

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AB - We report an electrothermally-actuated microlens scanner that is suitable for biomedical imaging applications. The microlens has a large tunable range and a low driving voltage, and the lens is made of glass. The enabling device is a new electrothermal actuator design that is capable of large vertical actuation (∼0.9mm) on a 3 mm device footprint, with small lateral shift (<7μm) and tilting (<0.38°) at less than 4-V. The design, fabrication and characterization of the actuator are presented. Imaging results by the assembled microlens are also demonstrated.

KW - Confocal microscopy

KW - electrothermal bimorph

KW - large vertical displacement

KW - lateral shift free

KW - optical coherence microscopy

KW - tunable microlens

UR - https://www.scopus.com/pages/publications/77955160480

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JO - IEEE Journal of Quantum Electronics

JF - IEEE Journal of Quantum Electronics

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M1 - 5518513

ER -

A millimeter-tunable-range microlens for endoscopic biomedical imaging applications

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Keywords

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