A Low-Voltage, Low-Current, Digital-Driven MEMS Mirror for Low-Power LiDAR

Dingkang Wang; Lenworth Thomas; Sanjeev Koppal; Yingtao Ding; Huikai Xie

doi:10.1109/LSENS.2020.3006813

A Low-Voltage, Low-Current, Digital-Driven MEMS Mirror for Low-Power LiDAR

Dingkang Wang^*
, Lenworth Thomas
, Sanjeev Koppal
, Yingtao Ding
, Huikai Xie

^*Corresponding author for this work

School of Integrated Circuits and Electronics

University of Florida

Research output: Contribution to journal › Article › peer-review

31 Citations (Scopus)

Abstract

Microelectromechanical (MEMS) mirrors have provided a fast and compact method to modulate light for mobile-scale projectors, LiDAR, and computational cameras. In this letter, we propose a new MEMS mirror design and its actuation method that is specifically built for low-voltage, low-current, and digital-driven IoT applications. The MEMS mirror specifically designed with direct actuation from the microcontroller was successfully fabricated and characterized. A full low-power LiDAR system based on the fabricated MEMS mirror was demonstrated, which was powered by a 9-V commercial battery.

Original language	English
Article number	9131806
Journal	IEEE Sensors Letters
Volume	4
Issue number	8
DOIs	https://doi.org/10.1109/LSENS.2020.3006813
Publication status	Published - Aug 2020

Keywords

LiDAR
Sensor-actuators
electrothermal actuator
microelectromechanical (MEMS) mirror

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10.1109/LSENS.2020.3006813

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title = "A Low-Voltage, Low-Current, Digital-Driven MEMS Mirror for Low-Power LiDAR",

abstract = "Microelectromechanical (MEMS) mirrors have provided a fast and compact method to modulate light for mobile-scale projectors, LiDAR, and computational cameras. In this letter, we propose a new MEMS mirror design and its actuation method that is specifically built for low-voltage, low-current, and digital-driven IoT applications. The MEMS mirror specifically designed with direct actuation from the microcontroller was successfully fabricated and characterized. A full low-power LiDAR system based on the fabricated MEMS mirror was demonstrated, which was powered by a 9-V commercial battery.",

keywords = "LiDAR, Sensor-actuators, electrothermal actuator, microelectromechanical (MEMS) mirror",

author = "Dingkang Wang and Lenworth Thomas and Sanjeev Koppal and Yingtao Ding and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.",

year = "2020",

month = aug,

doi = "10.1109/LSENS.2020.3006813",

language = "English",

volume = "4",

journal = "IEEE Sensors Letters",

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T1 - A Low-Voltage, Low-Current, Digital-Driven MEMS Mirror for Low-Power LiDAR

AU - Wang, Dingkang

AU - Thomas, Lenworth

AU - Koppal, Sanjeev

AU - Ding, Yingtao

AU - Xie, Huikai

PY - 2020/8

Y1 - 2020/8

N2 - Microelectromechanical (MEMS) mirrors have provided a fast and compact method to modulate light for mobile-scale projectors, LiDAR, and computational cameras. In this letter, we propose a new MEMS mirror design and its actuation method that is specifically built for low-voltage, low-current, and digital-driven IoT applications. The MEMS mirror specifically designed with direct actuation from the microcontroller was successfully fabricated and characterized. A full low-power LiDAR system based on the fabricated MEMS mirror was demonstrated, which was powered by a 9-V commercial battery.

AB - Microelectromechanical (MEMS) mirrors have provided a fast and compact method to modulate light for mobile-scale projectors, LiDAR, and computational cameras. In this letter, we propose a new MEMS mirror design and its actuation method that is specifically built for low-voltage, low-current, and digital-driven IoT applications. The MEMS mirror specifically designed with direct actuation from the microcontroller was successfully fabricated and characterized. A full low-power LiDAR system based on the fabricated MEMS mirror was demonstrated, which was powered by a 9-V commercial battery.

KW - LiDAR

KW - Sensor-actuators

KW - electrothermal actuator

KW - microelectromechanical (MEMS) mirror

UR - https://www.scopus.com/pages/publications/85090266255

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DO - 10.1109/LSENS.2020.3006813

M3 - Article

AN - SCOPUS:85090266255

SN - 2475-1472

VL - 4

JO - IEEE Sensors Letters

JF - IEEE Sensors Letters

IS - 8

M1 - 9131806

ER -

A Low-Voltage, Low-Current, Digital-Driven MEMS Mirror for Low-Power LiDAR

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Keywords

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