@inproceedings{5abd2d0b29d34d358507d5929764fc4f,
title = "A lateral-shift-free LVD microlens scanner for confocal microscopy",
abstract = "We report a lateral-shift-free (LSF) large-vertical-displacement (LVD) microlens scanner for tunable focusing applications such as confocal microscopy. A polymer microlens is integrated into a lens holder actuated by a LSF-LVD microactuator. The focal plane of the microlens can be vertically displaced 0.7mm at only 7.5V The observed maximum lateral shift and tilt of the microlens during the entire vertical actuation are only about 13μm and 0.74° respectively. The resonance frequency of the vertical motion mode is 488Hz.",
keywords = "Bimorph, Confocal microscopy, Large vertical displacement, Lateral shift free, Tunable microlens",
author = "L. Wu and H. Xie",
year = "2007",
doi = "10.1109/OMEMS.2007.4373880",
language = "English",
isbn = "1424406412",
series = "2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS",
pages = "141--142",
booktitle = "2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS",
note = "2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS ; Conference date: 12-08-2007 Through 16-08-2007",
}