A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives

Xiaoyang Zhang; Liang Zhou; Huikai Xie

doi:10.1109/MEMSYS.2016.7421560

A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives

Xiaoyang Zhang
, Liang Zhou
, Huikai Xie^*

^*Corresponding author for this work

University of Florida

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

8 Citations (Scopus)

Abstract

This paper reports a micro-XZ-stage with large quasi-static displacement in both in-plane and out-of-plane directions, achieved by monolithic integration of large-vertical-displacement electrothermal Cu/W bimorph actuators and large-lateral-displacement electrostatic comb drives for the first time. The integration is enabled by a unique release process that can simultaneously attain high-aspect-ratio silicon comb drives and complete silicon removal underneath bimorph actuators. Over 40 μm in-plane displacement at 109.6 Vdc for the comb drives and 100 μm out-of-plane displacements at only 13.5 Vdc for the bimorph actuators have been realized for the fabricated device. The resonances of the out-of-plane bimorph actuators and the in-plane comb drives are 515 Hz and 477 Hz, respectively.

Original language	English
Title of host publication	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	71-74
Number of pages	4
ISBN (Electronic)	9781509019731
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421560
Publication status	Published - 26 Feb 2016
Externally published	Yes
Event	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2016-February
ISSN (Print)	1084-6999

Conference

Conference	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country/Territory	China
City	Shanghai
Period	24/01/16 → 28/01/16

Access to Document

10.1109/MEMSYS.2016.7421560

Cite this

Zhang, X., Zhou, L., & Xie, H. (2016). A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 71-74). Article 7421560 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421560

Zhang, Xiaoyang ; Zhou, Liang ; Xie, Huikai. / A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives. MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 71-74 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives",

abstract = "This paper reports a micro-XZ-stage with large quasi-static displacement in both in-plane and out-of-plane directions, achieved by monolithic integration of large-vertical-displacement electrothermal Cu/W bimorph actuators and large-lateral-displacement electrostatic comb drives for the first time. The integration is enabled by a unique release process that can simultaneously attain high-aspect-ratio silicon comb drives and complete silicon removal underneath bimorph actuators. Over 40 μm in-plane displacement at 109.6 Vdc for the comb drives and 100 μm out-of-plane displacements at only 13.5 Vdc for the bimorph actuators have been realized for the fabricated device. The resonances of the out-of-plane bimorph actuators and the in-plane comb drives are 515 Hz and 477 Hz, respectively.",

author = "Xiaoyang Zhang and Liang Zhou and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 ; Conference date: 24-01-2016 Through 28-01-2016",

year = "2016",

month = feb,

day = "26",

doi = "10.1109/MEMSYS.2016.7421560",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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Zhang, X, Zhou, L & Xie, H 2016, A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives. in MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems., 7421560, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2016-February, Institute of Electrical and Electronics Engineers Inc., pp. 71-74, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421560

A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives. / Zhang, Xiaoyang; Zhou, Liang; Xie, Huikai.
MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. p. 71-74 7421560 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Zhang, Xiaoyang

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AU - Xie, Huikai

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N2 - This paper reports a micro-XZ-stage with large quasi-static displacement in both in-plane and out-of-plane directions, achieved by monolithic integration of large-vertical-displacement electrothermal Cu/W bimorph actuators and large-lateral-displacement electrostatic comb drives for the first time. The integration is enabled by a unique release process that can simultaneously attain high-aspect-ratio silicon comb drives and complete silicon removal underneath bimorph actuators. Over 40 μm in-plane displacement at 109.6 Vdc for the comb drives and 100 μm out-of-plane displacements at only 13.5 Vdc for the bimorph actuators have been realized for the fabricated device. The resonances of the out-of-plane bimorph actuators and the in-plane comb drives are 515 Hz and 477 Hz, respectively.

AB - This paper reports a micro-XZ-stage with large quasi-static displacement in both in-plane and out-of-plane directions, achieved by monolithic integration of large-vertical-displacement electrothermal Cu/W bimorph actuators and large-lateral-displacement electrostatic comb drives for the first time. The integration is enabled by a unique release process that can simultaneously attain high-aspect-ratio silicon comb drives and complete silicon removal underneath bimorph actuators. Over 40 μm in-plane displacement at 109.6 Vdc for the comb drives and 100 μm out-of-plane displacements at only 13.5 Vdc for the bimorph actuators have been realized for the fabricated device. The resonances of the out-of-plane bimorph actuators and the in-plane comb drives are 515 Hz and 477 Hz, respectively.

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Zhang X, Zhou L, Xie H. A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2016. p. 71-74. 7421560. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2016.7421560

A large range micro-XZ-stage with monolithic integration of electrothermal bimorph actuators and electrostatic comb drives

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