@inproceedings{6860fdb58be14f8cb63420bfdc5b9f35,
title = "A large piston displacement mems mirror with electrothermal ladder actuator arrays for fourier transform spectroscopy applications",
abstract = "A large displacement piston motion micromirror is designed, fabricated and tested with device features tuned to application in a hand-portable Fourier Transform Spectroscopy (FTS) system. The fabricated MEMS mirror is based on electrothermal actuation and has a footprint of 1.9×1.9×0.5mm3 with a mirror aperture of 1.02mm. The application optimized device holds key features of ultralow maximum tilt of 0.25°, a large, strongly linear motion of 90μm achievable at only 1.2V dc and a maximum theoretical spectral resolution of 55.6cm-1. This device is further characterized with pertinent characteristics for applicability to rapid scan FTS system configurations.",
author = "Samuelson, \{S. R.\} and H. Xie",
note = "Publisher Copyright: {\textcopyright} 2012 TRF.; 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 ; Conference date: 03-06-2012 Through 07-06-2012",
year = "2012",
doi = "10.31438/trf.hh2012.38",
language = "English",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "141--144",
editor = "Mehran Mehregany and Monk, \{David J.\}",
booktitle = "2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012",
}