@inproceedings{63c3d19283954ef89b8d2266c3a55f52,
title = "A Large In-plane-displacement Micro-platform Based on Electrothermal Bimorph Actuation",
abstract = "Electrothermal bimorphs are known for large vertical displacement. In this paper, an electrothermal bimorph actuator with a multi-section structure is proposed to generate large in-plane displacement with the vertical motion minimized. The device has been fabricated and tested. With a 500 μm × 500 μm micro-platform attached at the end of the actuator, the maximum in-plane displacement reaches 86 μm at just 4.5 Vdc, while the corresponding out-of-plane displacement is only a quarter of the in-plane one. This device has excellent in-plane moving ability and can be used as part of multiple degrees of freedom MEMS actuators, which makes it a great potential in applications such as optical image stabilization.",
keywords = "electrothermal bimorph actuation, large in-plane displacement, micro-platform, OIS",
author = "Jingyi Chen and Hengzhang Yang and Shaoyu Zhao and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 19th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024 ; Conference date: 02-05-2024 Through 05-05-2024",
year = "2024",
doi = "10.1109/NEMS60219.2024.10639933",
language = "English",
series = "2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2024",
address = "United States",
}