TY - GEN
T1 - A High-Speed and Stable Flexible Electromagnetic Actuator with Enhanced Vibration Performance for Advanced Tactile Human-Machine Interfaces
AU - Wang, Biyan
AU - Chen, Menglin
AU - Jiang, Senlin
AU - Zhou, Wenbiao
AU - Xie, Huikai
AU - Wang, Xiaoyi
N1 - Publisher Copyright:
© 2026 IEEE.
PY - 2026
Y1 - 2026
N2 - This work introduces a high-speed and stable flexible electromagnetic actuator designed for large-displacement tactile feedback in human-machine interaction (HMI). The actuator employs a cantilever-inspired suspension structure, in which polyimide (PI) films serve as the flexible support frame for the permanent magnet, driven by optimized MEMS-fabricated copper coils. Experimental results demonstrated a resonance frequency of 123 Hz well within the most sensitive range of human skin-and a peak vibration displacement of 1456.23 μ m, greatly exceeding human perceptual thresholds. In addition, the actuator exhibited excellent stability with an average repeatability error of only 0.78% and ultrafast dynamic performance, achieving rise and fall times of 31.4 ms and 22.3 ms, respectively. These characteristics highlight its strong potential as a core component for high-precision, high-speed tactile interfaces in next-generation wearable and interactive HMI systems.
AB - This work introduces a high-speed and stable flexible electromagnetic actuator designed for large-displacement tactile feedback in human-machine interaction (HMI). The actuator employs a cantilever-inspired suspension structure, in which polyimide (PI) films serve as the flexible support frame for the permanent magnet, driven by optimized MEMS-fabricated copper coils. Experimental results demonstrated a resonance frequency of 123 Hz well within the most sensitive range of human skin-and a peak vibration displacement of 1456.23 μ m, greatly exceeding human perceptual thresholds. In addition, the actuator exhibited excellent stability with an average repeatability error of only 0.78% and ultrafast dynamic performance, achieving rise and fall times of 31.4 ms and 22.3 ms, respectively. These characteristics highlight its strong potential as a core component for high-precision, high-speed tactile interfaces in next-generation wearable and interactive HMI systems.
KW - HMI
KW - MEMS electromagnetic actuator
KW - Tactile Feedback
KW - Vibration displacement
UR - https://www.scopus.com/pages/publications/105041743903
U2 - 10.1109/MEMS64181.2026.11419332
DO - 10.1109/MEMS64181.2026.11419332
M3 - Conference contribution
AN - SCOPUS:105041743903
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 624
EP - 627
BT - 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026
Y2 - 25 January 2026 through 29 January 2026
ER -