@inproceedings{cab45bcd3a7b496d896efcb3f1cf9d10,
title = "A High-Sensitivity Electric Field Sensor Based on Nonlinear Frequency Difference in a Clamped-Clamped Beam Resonator",
abstract = "In this work, we propose a quasi-digital readout scheme for frequency-modulated (FM) resonant micro-electric field sensors (MEFS) by leveraging the nonlinear hysteresis loop width - specifically, the frequency difference between the forward and backward sweep bifurcation points. In the linear regime, the frequency shift exhibits a quadratic dependence on the electric field, with sensitivities of 0.085√Hz/kV/m) for lateral perturbation and 0.037√Hz/(kV/m) for axial perturbation. By operating in the nonlinear regime and utilizing the frequency difference as the output metric, the sensor achieves a sensitivity of 0.629Hz/(kV/m) with a direct linear response to the applied electric field. This represents a substantial improvement in sensitivity compared to conventional linear-regime operation. This work provides a novel approach for achieving high-sensitivity measurements in frequency-modulated MEFS.",
keywords = "Electric field sensors, MEMS, Nonlinear dynamics, frequency output",
author = "Weiyang Li and Pinyi Li and Najib Kacem and Jianhua Li and Xiaolong Wen and Seshia, \{Ashwin A.\}",
note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 21st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026 ; Conference date: 17-04-2026 Through 21-04-2026",
year = "2026",
doi = "10.1109/NEMS69704.2026.11634259",
language = "English",
series = "2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "311--314",
booktitle = "2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026",
address = "United States",
}