A fourier transform spectrometer based on an electrothermal MEMS mirror with improved linear scan range

Wei Wang; Jiapin Chen; Aleksandar S. Zivkovic; Huikai Xie

doi:10.3390/s16101611

A fourier transform spectrometer based on an electrothermal MEMS mirror with improved linear scan range

Wei Wang^*, Jiapin Chen, Aleksandar S. Zivkovic, Huikai Xie

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified lateral-shift-free (LSF) bimorph actuator design with large piston and reduced tilting. Combined with a position-sensitive device (PSD) for tilt angle sensing, the feedback controlled MEMS mirror generates a 430 µm stable linear piston scan with the mirror plate tilting angle less than ±0.002°. The usable piston scan range is increased to 78% of the MEMS mirror’s full scan capability, and a spectral resolution of 0.55 nm at 531.9 nm wavelength, has been achieved. It is a significant improvement compared to the prior work.

Original language	English
Article number	1611
Journal	Sensors
Volume	16
Issue number	10
DOIs	https://doi.org/10.3390/s16101611
Publication status	Published - 1 Oct 2016
Externally published	Yes

Keywords

Closed-loop control
Electrothermal micromirror
Fourier transform spectrometer
Microelectromechanical systems (MEMS)

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10.3390/s16101611

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title = "A fourier transform spectrometer based on an electrothermal MEMS mirror with improved linear scan range",

abstract = "A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified lateral-shift-free (LSF) bimorph actuator design with large piston and reduced tilting. Combined with a position-sensitive device (PSD) for tilt angle sensing, the feedback controlled MEMS mirror generates a 430 µm stable linear piston scan with the mirror plate tilting angle less than ±0.002°. The usable piston scan range is increased to 78% of the MEMS mirror{\textquoteright}s full scan capability, and a spectral resolution of 0.55 nm at 531.9 nm wavelength, has been achieved. It is a significant improvement compared to the prior work.",

keywords = "Closed-loop control, Electrothermal micromirror, Fourier transform spectrometer, Microelectromechanical systems (MEMS)",

author = "Wei Wang and Jiapin Chen and Zivkovic, {Aleksandar S.} and Huikai Xie",

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AU - Wang, Wei

AU - Chen, Jiapin

AU - Zivkovic, Aleksandar S.

AU - Xie, Huikai

PY - 2016/10/1

Y1 - 2016/10/1

N2 - A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified lateral-shift-free (LSF) bimorph actuator design with large piston and reduced tilting. Combined with a position-sensitive device (PSD) for tilt angle sensing, the feedback controlled MEMS mirror generates a 430 µm stable linear piston scan with the mirror plate tilting angle less than ±0.002°. The usable piston scan range is increased to 78% of the MEMS mirror’s full scan capability, and a spectral resolution of 0.55 nm at 531.9 nm wavelength, has been achieved. It is a significant improvement compared to the prior work.

AB - A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified lateral-shift-free (LSF) bimorph actuator design with large piston and reduced tilting. Combined with a position-sensitive device (PSD) for tilt angle sensing, the feedback controlled MEMS mirror generates a 430 µm stable linear piston scan with the mirror plate tilting angle less than ±0.002°. The usable piston scan range is increased to 78% of the MEMS mirror’s full scan capability, and a spectral resolution of 0.55 nm at 531.9 nm wavelength, has been achieved. It is a significant improvement compared to the prior work.

KW - Closed-loop control

KW - Electrothermal micromirror

KW - Fourier transform spectrometer

KW - Microelectromechanical systems (MEMS)

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ER -

A fourier transform spectrometer based on an electrothermal MEMS mirror with improved linear scan range

Abstract

Keywords

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