A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement

Xiaoyi Wang; Xingru Chen; Yang Deng; Yik Kin Cheung; Peng Jiang; Wei Xu; Hongyu Yu

doi:10.1109/MEMS51670.2022.9699452

A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement

Xiaoyi Wang
, Xingru Chen
, Yang Deng
, Yik Kin Cheung
, Peng Jiang
, Wei Xu
, Hongyu Yu^*

^*Corresponding author for this work

Hong Kong University of Science and Technology
Shenzhen University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

For the first time, we report a novel flexible flow sensor with quadruple heaters and a suspended structure with excellent performance. The device was fabricated using platinum thermal resistors and ultra-thin Parylene C film (20 m) integrated with a flexible silicone substrate with a cavity. Instead of using traditional hot wire or calorimetric design, the high-performance flow sensor was designed with a quadruple heaters (QH) structure, which benefits the circuit's plicity and performance enhancement. Compared with the sensitivity of the hot wire mode (32.3 mV/m/s) and sensor with a non-suspended structure (13.7 mV/m/s), the proposed novel flow sensor achieved around one order magnitude higher sensitivity of 181.6 mV/m/s. Furthermore, the sensor also owns the characteristics of better symmetrically bidirectional sensing function, high repeatability, and stability. Additionally, with its excellent performance and flexible characteristic, the sensor is a promising candidate as a wearable respiration monitoring device for human health monitoring.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	652-655
Number of pages	4
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699452
Publication status	Published - 2022
Externally published	Yes
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2022-January
ISSN (Print)	1084-6999

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	9/01/22 → 13/01/22

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Keywords

Flow sensor
flexible sensor
performance enhancement
quadruple heaters
suspended structure

Access to Document

10.1109/MEMS51670.2022.9699452

Cite this

Wang, X., Chen, X., Deng, Y., Cheung, Y. K., Jiang, P., Xu, W., & Yu, H. (2022). A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 652-655). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51670.2022.9699452

Wang, Xiaoyi ; Chen, Xingru ; Deng, Yang et al. / A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement. 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. pp. 652-655 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{043a281572ad4e76bf8689dfcdf36f67,

title = "A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement",

abstract = "For the first time, we report a novel flexible flow sensor with quadruple heaters and a suspended structure with excellent performance. The device was fabricated using platinum thermal resistors and ultra-thin Parylene C film (20 m) integrated with a flexible silicone substrate with a cavity. Instead of using traditional hot wire or calorimetric design, the high-performance flow sensor was designed with a quadruple heaters (QH) structure, which benefits the circuit's plicity and performance enhancement. Compared with the sensitivity of the hot wire mode (32.3 mV/m/s) and sensor with a non-suspended structure (13.7 mV/m/s), the proposed novel flow sensor achieved around one order magnitude higher sensitivity of 181.6 mV/m/s. Furthermore, the sensor also owns the characteristics of better symmetrically bidirectional sensing function, high repeatability, and stability. Additionally, with its excellent performance and flexible characteristic, the sensor is a promising candidate as a wearable respiration monitoring device for human health monitoring.",

keywords = "Flow sensor, flexible sensor, performance enhancement, quadruple heaters, suspended structure",

author = "Xiaoyi Wang and Xingru Chen and Yang Deng and Cheung, \{Yik Kin\} and Peng Jiang and Wei Xu and Hongyu Yu",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

year = "2022",

doi = "10.1109/MEMS51670.2022.9699452",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "652--655",

booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",

address = "United States",

}

Wang, X, Chen, X, Deng, Y, Cheung, YK, Jiang, P, Xu, W & Yu, H 2022, A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2022-January, Institute of Electrical and Electronics Engineers Inc., pp. 652-655, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699452

A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement. / Wang, Xiaoyi; Chen, Xingru; Deng, Yang et al.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 652-655 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement

AU - Wang, Xiaoyi

AU - Chen, Xingru

AU - Deng, Yang

AU - Cheung, Yik Kin

AU - Jiang, Peng

AU - Xu, Wei

AU - Yu, Hongyu

PY - 2022

Y1 - 2022

N2 - For the first time, we report a novel flexible flow sensor with quadruple heaters and a suspended structure with excellent performance. The device was fabricated using platinum thermal resistors and ultra-thin Parylene C film (20 m) integrated with a flexible silicone substrate with a cavity. Instead of using traditional hot wire or calorimetric design, the high-performance flow sensor was designed with a quadruple heaters (QH) structure, which benefits the circuit's plicity and performance enhancement. Compared with the sensitivity of the hot wire mode (32.3 mV/m/s) and sensor with a non-suspended structure (13.7 mV/m/s), the proposed novel flow sensor achieved around one order magnitude higher sensitivity of 181.6 mV/m/s. Furthermore, the sensor also owns the characteristics of better symmetrically bidirectional sensing function, high repeatability, and stability. Additionally, with its excellent performance and flexible characteristic, the sensor is a promising candidate as a wearable respiration monitoring device for human health monitoring.

AB - For the first time, we report a novel flexible flow sensor with quadruple heaters and a suspended structure with excellent performance. The device was fabricated using platinum thermal resistors and ultra-thin Parylene C film (20 m) integrated with a flexible silicone substrate with a cavity. Instead of using traditional hot wire or calorimetric design, the high-performance flow sensor was designed with a quadruple heaters (QH) structure, which benefits the circuit's plicity and performance enhancement. Compared with the sensitivity of the hot wire mode (32.3 mV/m/s) and sensor with a non-suspended structure (13.7 mV/m/s), the proposed novel flow sensor achieved around one order magnitude higher sensitivity of 181.6 mV/m/s. Furthermore, the sensor also owns the characteristics of better symmetrically bidirectional sensing function, high repeatability, and stability. Additionally, with its excellent performance and flexible characteristic, the sensor is a promising candidate as a wearable respiration monitoring device for human health monitoring.

KW - Flow sensor

KW - flexible sensor

KW - performance enhancement

KW - quadruple heaters

KW - suspended structure

UR - https://www.scopus.com/pages/publications/85126395602

U2 - 10.1109/MEMS51670.2022.9699452

DO - 10.1109/MEMS51670.2022.9699452

M3 - Conference contribution

AN - SCOPUS:85126395602

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 652

EP - 655

BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

Y2 - 9 January 2022 through 13 January 2022

ER -

Wang X, Chen X, Deng Y, Cheung YK, Jiang P, Xu W et al. A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. p. 652-655. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51670.2022.9699452

A Flexible Thermal Flow Sensor with Quadruple Heaters and Suspended Structure for Performance Enhancement

Abstract

Publication series

Conference

UN SDGs

Keywords

Access to Document

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