@inproceedings{8005fe25b0ae47649d1dbd1a14039601,
title = "A Double-Sided Electrothermal Micromirror Array With Drive Resistance Compensation",
abstract = "Electrothermal MEMS micromirror arrays are low-voltage driven optical modulation devices with large out-of-plane displacement. There is a critical challenge to realize uniform control over individual micromirror units. This study presents a drive resistance compensation method for the electrothermal micromirror array to minimize cross-channel resistance discrepancies. Based on this scheme, a double-sided, highly reflective micromirror array is fabricated and characterized.",
keywords = "double-sided mirror, electrothermal actuation, electrothermal micromirror array, resistance compensation",
author = "Wenchao Zhang and Xinyu Ding and Hengzhang Yang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024 ; Conference date: 28-07-2024 Through 01-08-2024",
year = "2024",
doi = "10.1109/OMN61224.2024.10685277",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024",
address = "United States",
}