A Double-Sided Electrothermal Micromirror Array With Drive Resistance Compensation

Wenchao Zhang; Xinyu Ding; Hengzhang Yang; Huikai Xie

doi:10.1109/OMN61224.2024.10685277

A Double-Sided Electrothermal Micromirror Array With Drive Resistance Compensation

Wenchao Zhang, Xinyu Ding, Hengzhang Yang, Huikai Xie^*

^*Corresponding author for this work

School of Integrated Circuits and Electronics

Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Electrothermal MEMS micromirror arrays are low-voltage driven optical modulation devices with large out-of-plane displacement. There is a critical challenge to realize uniform control over individual micromirror units. This study presents a drive resistance compensation method for the electrothermal micromirror array to minimize cross-channel resistance discrepancies. Based on this scheme, a double-sided, highly reflective micromirror array is fabricated and characterized.

Original language	English
Title of host publication	2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024
Publisher	IEEE Computer Society
ISBN (Electronic)	9798350384925
DOIs	https://doi.org/10.1109/OMN61224.2024.10685277
Publication status	Published - 2024
Event	2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024 - San Sebastian, Spain Duration: 28 Jul 2024 → 1 Aug 2024

Publication series

Name	International Conference on Optical MEMS and Nanophotonics
ISSN (Print)	2160-5033
ISSN (Electronic)	2160-5041

Conference

Conference	2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024
Country/Territory	Spain
City	San Sebastian
Period	28/07/24 → 1/08/24

Keywords

double-sided mirror
electrothermal actuation
electrothermal micromirror array
resistance compensation

Access to Document

10.1109/OMN61224.2024.10685277

Cite this

@inproceedings{8005fe25b0ae47649d1dbd1a14039601,

title = "A Double-Sided Electrothermal Micromirror Array With Drive Resistance Compensation",

abstract = "Electrothermal MEMS micromirror arrays are low-voltage driven optical modulation devices with large out-of-plane displacement. There is a critical challenge to realize uniform control over individual micromirror units. This study presents a drive resistance compensation method for the electrothermal micromirror array to minimize cross-channel resistance discrepancies. Based on this scheme, a double-sided, highly reflective micromirror array is fabricated and characterized.",

keywords = "double-sided mirror, electrothermal actuation, electrothermal micromirror array, resistance compensation",

author = "Wenchao Zhang and Xinyu Ding and Hengzhang Yang and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024 ; Conference date: 28-07-2024 Through 01-08-2024",

year = "2024",

doi = "10.1109/OMN61224.2024.10685277",

language = "English",

series = "International Conference on Optical MEMS and Nanophotonics",

publisher = "IEEE Computer Society",

booktitle = "2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024",

address = "United States",

}

Zhang, W, Ding, X, Yang, H & Xie, H 2024, A Double-Sided Electrothermal Micromirror Array With Drive Resistance Compensation. in 2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024. International Conference on Optical MEMS and Nanophotonics, IEEE Computer Society, 2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024, San Sebastian, Spain, 28/07/24. https://doi.org/10.1109/OMN61224.2024.10685277

A Double-Sided Electrothermal Micromirror Array With Drive Resistance Compensation. / Zhang, Wenchao; Ding, Xinyu; Yang, Hengzhang et al.
2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024. IEEE Computer Society, 2024. (International Conference on Optical MEMS and Nanophotonics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A Double-Sided Electrothermal Micromirror Array With Drive Resistance Compensation

AU - Zhang, Wenchao

AU - Ding, Xinyu

AU - Yang, Hengzhang

AU - Xie, Huikai

PY - 2024

Y1 - 2024

N2 - Electrothermal MEMS micromirror arrays are low-voltage driven optical modulation devices with large out-of-plane displacement. There is a critical challenge to realize uniform control over individual micromirror units. This study presents a drive resistance compensation method for the electrothermal micromirror array to minimize cross-channel resistance discrepancies. Based on this scheme, a double-sided, highly reflective micromirror array is fabricated and characterized.

AB - Electrothermal MEMS micromirror arrays are low-voltage driven optical modulation devices with large out-of-plane displacement. There is a critical challenge to realize uniform control over individual micromirror units. This study presents a drive resistance compensation method for the electrothermal micromirror array to minimize cross-channel resistance discrepancies. Based on this scheme, a double-sided, highly reflective micromirror array is fabricated and characterized.

KW - double-sided mirror

KW - electrothermal actuation

KW - electrothermal micromirror array

KW - resistance compensation

UR - http://www.scopus.com/inward/record.url?scp=85206185903&partnerID=8YFLogxK

U2 - 10.1109/OMN61224.2024.10685277

DO - 10.1109/OMN61224.2024.10685277

M3 - Conference contribution

AN - SCOPUS:85206185903

T3 - International Conference on Optical MEMS and Nanophotonics

BT - 2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024

PB - IEEE Computer Society

T2 - 2024 International Conference on Optical MEMS and Nanophotonics, OMN 2024

Y2 - 28 July 2024 through 1 August 2024

ER -

A Double-Sided Electrothermal Micromirror Array With Drive Resistance Compensation

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Keywords

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