TY - GEN
T1 - A CMOS-MEMS THERMAL CONVECTIVE ACCELEROMETER FOR PERFORMANCE ENHANCEMENT USING FILM THINNING METHOD
AU - Wang, Xiaoyi
AU - Liu, Zhongyi
AU - Lee, Yi Kuen
AU - Xie, Huikai
N1 - Publisher Copyright:
© 2022 MicroTAS 2022 - 26th International Conference on Miniaturized Systems for Chemistry and Life Sciences. All rights reserved.
PY - 2022
Y1 - 2022
N2 - This paper presents a CMOS-compatible micromachined thermal convective accelerometer (MTCA) with improved sensitivity (S) and lowered power consumption (P). Firstly, a theoretical model was introduced to analyze the film thickness effect on the performance of the device, revealing that a thinner film thickness can contribute to higher sensitivity and lower power consumption. Secondly, leveraging the Global Foundry 0.18μm 1P6M CMOS technology, the inter-metal layer was designed as the hard mask for the structure patterning and film thinning. Finally, the homemade front side dry etching method was used to conduct the post-CMOS processing process and the experimental results demonstrated the method used for performance enhancement of MTCA.
AB - This paper presents a CMOS-compatible micromachined thermal convective accelerometer (MTCA) with improved sensitivity (S) and lowered power consumption (P). Firstly, a theoretical model was introduced to analyze the film thickness effect on the performance of the device, revealing that a thinner film thickness can contribute to higher sensitivity and lower power consumption. Secondly, leveraging the Global Foundry 0.18μm 1P6M CMOS technology, the inter-metal layer was designed as the hard mask for the structure patterning and film thinning. Finally, the homemade front side dry etching method was used to conduct the post-CMOS processing process and the experimental results demonstrated the method used for performance enhancement of MTCA.
KW - CMOS-MEMS
KW - Film Thinning Method
KW - Micro Thermal Convective Accelerometer
UR - https://www.scopus.com/pages/publications/85175725875
M3 - Conference contribution
AN - SCOPUS:85175725875
T3 - MicroTAS 2022 - 26th International Conference on Miniaturized Systems for Chemistry and Life Sciences
SP - 1151
EP - 1152
BT - MicroTAS 2022 - 26th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PB - Chemical and Biological Microsystems Society
T2 - 26th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2022
Y2 - 23 October 2022 through 27 October 2022
ER -