A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging

Haoran Wang; Zhenfang Chen; Hao Yang; Huabei Jiang; Huikai Xie

doi:10.1109/JMEMS.2020.3010773

A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging

Haoran Wang^*
, Zhenfang Chen
, Hao Yang
, Huabei Jiang
, Huikai Xie

^*Corresponding author for this work

School of Integrated Circuits and Electronics

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

In this paper, we present the design, fabrication, and characterization of a compact 4× 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4μ m-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8×1.6 mm2 with each pMUT element having a diameter of 210μ m. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array. [2020-0087].

Original language	English
Article number	9151286
Pages (from-to)	1038-1043
Number of pages	6
Journal	Journal of Microelectromechanical Systems
Volume	29
Issue number	5
DOIs	https://doi.org/10.1109/JMEMS.2020.3010773
Publication status	Published - Oct 2020

Keywords

Microelectromechanical systems
PMUT array
ceramic pzt
endoscopic imaging
photoacoustic imaging
piezoelectric micromachined ultrasonic transducers

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10.1109/JMEMS.2020.3010773

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title = "A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging",

abstract = "In this paper, we present the design, fabrication, and characterization of a compact 4× 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4μ m-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8×1.6 mm2 with each pMUT element having a diameter of 210μ m. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array. [2020-0087].",

keywords = "Microelectromechanical systems, PMUT array, ceramic pzt, endoscopic imaging, photoacoustic imaging, piezoelectric micromachined ultrasonic transducers",

author = "Haoran Wang and Zhenfang Chen and Hao Yang and Huabei Jiang and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 1992-2012 IEEE.",

year = "2020",

month = oct,

doi = "10.1109/JMEMS.2020.3010773",

language = "English",

volume = "29",

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AU - Chen, Zhenfang

AU - Yang, Hao

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AU - Xie, Huikai

PY - 2020/10

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AB - In this paper, we present the design, fabrication, and characterization of a compact 4× 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4μ m-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8×1.6 mm2 with each pMUT element having a diameter of 210μ m. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array. [2020-0087].

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KW - endoscopic imaging

KW - photoacoustic imaging

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A Ceramic PZT-Based PMUT Array for Endoscopic Photoacoustic Imaging

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