TY - GEN
T1 - A bulk micromachined cantilever array for uncooled infrared imaging
AU - Yi, Yuliang
AU - Ma, Shenglin
AU - Yu, Xiaomei
AU - Liu, Ming
AU - Liu, Xiaohua
PY - 2008
Y1 - 2008
N2 - This paper presents a bi-material microcantilever focal plane array (FPA) for uncooled infrared (IR) imaging. The FPA was fabricated by a bulk silicon micromachining method with substrate silicon selectively removed by deep reactive ion etching (DRIE) technique at the area where each cantilever pixel is located. The absorbance of the IR radiation can be improved by 48% due to the selective removal of the substrate, and hence the noise equivalent temperature difference (NETD) of the FPA can be reduced by 32% compared to the one fabricated by sacrificial layer technique, approaching 60mK. The thermomechanical sensitivity and the response time of the FPA were measured and calculated to be 112nm/K and 15ms, respectively. An image of human bodies was captured by an optical readout method.
AB - This paper presents a bi-material microcantilever focal plane array (FPA) for uncooled infrared (IR) imaging. The FPA was fabricated by a bulk silicon micromachining method with substrate silicon selectively removed by deep reactive ion etching (DRIE) technique at the area where each cantilever pixel is located. The absorbance of the IR radiation can be improved by 48% due to the selective removal of the substrate, and hence the noise equivalent temperature difference (NETD) of the FPA can be reduced by 32% compared to the one fabricated by sacrificial layer technique, approaching 60mK. The thermomechanical sensitivity and the response time of the FPA were measured and calculated to be 112nm/K and 15ms, respectively. An image of human bodies was captured by an optical readout method.
UR - https://www.scopus.com/pages/publications/69949161232
U2 - 10.1115/MicroNano2008-70109
DO - 10.1115/MicroNano2008-70109
M3 - Conference contribution
AN - SCOPUS:69949161232
SN - 0791842940
SN - 9780791842942
T3 - 2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008
SP - 129
EP - 132
BT - 2008 Proceedings of the ASME - 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008
T2 - 2008 ASME 2nd International Conference on Integration and Commercialization of Micro and Nanosystems, MicroNano 2008
Y2 - 3 June 2008 through 5 June 2008
ER -