@inproceedings{a4f5a07a768f43cc8b8e32830af78e25,
title = "A 3D Self-Roll Inductor Based on Al-SiO2 Bimorphs",
abstract = "Integrable high-energy-density passives with small form factor are in high demand for consumer electronic applications. In this work, a novel three-dimensional (3D) inductor based on a multi-turn self-roll microtube is proposed. The self-roll microtube is made of an Al-SiO2 bimorph structure that is fabricated directly on a high-resistivity silicon substrate. Only two steps of photolithography are needed and the fabrication process is CMOS-compatible. The released bimorphs typically roll into 2-turn microtubes with inner diameters of about 220 μm. The measured inductance areal density is over 120 nH/mm2 for the fabricated single-microtube inductors. This type of 3D inductors has promising applications in RF transceivers.",
keywords = "3D Inductor, Bimorph, CMOS-compatible process, MEMS, Microelectromechanical system, Self-roll",
author = "Hengzhang Yang and Jian Gao and Yingtao Ding and Yuwen Su and Yan, {Yang Yang} and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "English",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "845--848",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
address = "United States",
}