@inproceedings{073ae4c5f6b94d739b4ca2f3da129fd8,
title = "A 2-Axis Scanning Comb-Drive Micromirror with Polymer-Filled Isolation Trenches",
abstract = "In this work, silicon trenches filled with polymer are incorporated to provide the electrical isolation of silicon needed in two-axis scanning electrostatic comb-drive micromirrors. This polymer-filled trench isolation method overcomes such issues as high processing temperature, uneven surface, and high stresses, encountered by the commonly used polysilicon-filled isolation. In particular, Benzocyclobutene (BCB) is employed and it can fill deep silicon trenches. Experimental results show that the fabricated 2-axis mirrors can achieve a large field of view of 30°×20° and stand high impact over 2500 g.",
keywords = "Comb-drive, Electrical isolation of silicon, Micromirror, Polymer-filled trench",
author = "Yingchao Cao and Yingtao Ding and Yangyang Yan and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "English",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1437--1440",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
address = "United States",
}