@inproceedings{21cca8801a91477fa0b7443f01eb909b,
title = "A 2-axis electrothermal MEMS micro-scanner with torsional beam",
abstract = "In this paper we introduce a 2-axis MEMS micro-scanner with large scanning range of frame (32°) and mirror (22°) using a compact and optimized electrothermal bimorph actuator and torsional beams to tip and tilt a dual-reflective mirror plate.",
keywords = "MOEMS, dry photoresist lamination, electrothermal micromirror, optical coherence tomography, torsion beam",
author = "Tanguy, \{Quentin A.A.\} and Can Duan and Wei Wang and Huikai Xie and Sylwester Bargiel and Przemyslaw Struk and Philippe Lutz and Christophe Gorecki",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 ; Conference date: 31-07-2016 Through 04-08-2016",
year = "2016",
month = sep,
day = "13",
doi = "10.1109/OMN.2016.7565919",
language = "English",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings",
address = "United States",
}