124° rotation angle electrothermal micromirror with integrated platinum heater

Lei Wu; Huikai Xie

doi:10.1109/JSTQE.2007.894066

124° rotation angle electrothermal micromirror with integrated platinum heater

Lei Wu^*, Huikai Xie

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

24 Citations (Scopus)

Abstract

We report a single-crystal silicon (SCS)-based micromirror that is electrothermally actuated by a platinum heater integrated at the end of a thermal bimorph actuator. The mirror size is 1 mm × 1 mm. A large rotation angle of 124° has been obtained at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz. The radius of curvature of the mirror plate is 130 mm. A lumped circuit model has been developed for electrothermomechanical behavioral simulation and design optimization. The simulation results by the circuit model match the experimental data to within 6.9%.

Original language	English
Pages (from-to)	316-320
Number of pages	5
Journal	IEEE Journal of Selected Topics in Quantum Electronics
Volume	13
Issue number	2
DOIs	https://doi.org/10.1109/JSTQE.2007.894066
Publication status	Published - Mar 2007
Externally published	Yes

Keywords

Electrothermal actuation
Micromirror
Optical scanners

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10.1109/JSTQE.2007.894066

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abstract = "We report a single-crystal silicon (SCS)-based micromirror that is electrothermally actuated by a platinum heater integrated at the end of a thermal bimorph actuator. The mirror size is 1 mm × 1 mm. A large rotation angle of 124° has been obtained at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz. The radius of curvature of the mirror plate is 130 mm. A lumped circuit model has been developed for electrothermomechanical behavioral simulation and design optimization. The simulation results by the circuit model match the experimental data to within 6.9\%.",

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AU - Xie, Huikai

PY - 2007/3

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AB - We report a single-crystal silicon (SCS)-based micromirror that is electrothermally actuated by a platinum heater integrated at the end of a thermal bimorph actuator. The mirror size is 1 mm × 1 mm. A large rotation angle of 124° has been obtained at a dc voltage of 12.5 V. The resonant frequency of the device is 336 Hz. The radius of curvature of the mirror plate is 130 mm. A lumped circuit model has been developed for electrothermomechanical behavioral simulation and design optimization. The simulation results by the circuit model match the experimental data to within 6.9%.

KW - Electrothermal actuation

KW - Micromirror

KW - Optical scanners

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JF - IEEE Journal of Selected Topics in Quantum Electronics

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ER -

124° rotation angle electrothermal micromirror with integrated platinum heater

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