高品质因子氟化镁晶体微腔制备与测试

Zhi Er Qu; Yi Jie Pan; Xian Wen Liu; Cheng Zhang; Jin Wang; Ji Feng Qu

doi:10.3969/j.issn.1000-1158.2023.08.03

高品质因子氟化镁晶体微腔制备与测试

Translated title of the contribution: Fabrication and Test of High Quality Factor MgF₂Crystal Microcavity

Zhi Er Qu, Yi Jie Pan^*, Xian Wen Liu, Cheng Zhang, Jin Wang, Ji Feng Qu

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

Abstract

Based on a linear motor, a high precision scale and a mechanical feedback unit, a precision automatic grinding and polishing system was developed. The system enabled accurately control the size, thickness and shape of the crystal microcavities during preparation. The trapezoidal micro-disk cavity of magnesium fluoride crystal with high quality factor was fabricated by preforming, rough grinding, rough polishing and fine polishing. The surface roughness of magnesium fluoride crystal after precision polishing was characterized to be 2. 84 nm using a white light interferometer. By setting up a taper fiber and crystal microcavity coupling testing system, the quality factor of the prepared crystal microcavity was measured to be 4. 55 × 10 at 1 550 nm by the optical cavity ring-down method.

Translated title of the contribution	Fabrication and Test of High Quality Factor MgF₂Crystal Microcavity
Original language	Chinese (Traditional)
Pages (from-to)	1169-1175
Number of pages	7
Journal	Jiliang Xuebao/Acta Metrologica Sinica
Volume	44
Issue number	8
DOIs	https://doi.org/10.3969/j.issn.1000-1158.2023.08.03
Publication status	Published - Aug 2023
Externally published	Yes

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title = "高品质因子氟化镁晶体微腔制备与测试",

abstract = "Based on a linear motor, a high precision scale and a mechanical feedback unit, a precision automatic grinding and polishing system was developed. The system enabled accurately control the size, thickness and shape of the crystal microcavities during preparation. The trapezoidal micro-disk cavity of magnesium fluoride crystal with high quality factor was fabricated by preforming, rough grinding, rough polishing and fine polishing. The surface roughness of magnesium fluoride crystal after precision polishing was characterized to be 2. 84 nm using a white light interferometer. By setting up a taper fiber and crystal microcavity coupling testing system, the quality factor of the prepared crystal microcavity was measured to be 4. 55 × 10 at 1 550 nm by the optical cavity ring-down method.",

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author = "Qu, {Zhi Er} and Pan, {Yi Jie} and Liu, {Xian Wen} and Cheng Zhang and Jin Wang and Qu, {Ji Feng}",

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doi = "10.3969/j.issn.1000-1158.2023.08.03",

language = "繁体中文",

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T1 - 高品质因子氟化镁晶体微腔制备与测试

AU - Qu, Zhi Er

AU - Pan, Yi Jie

AU - Liu, Xian Wen

AU - Zhang, Cheng

AU - Wang, Jin

AU - Qu, Ji Feng

PY - 2023/8

Y1 - 2023/8

N2 - Based on a linear motor, a high precision scale and a mechanical feedback unit, a precision automatic grinding and polishing system was developed. The system enabled accurately control the size, thickness and shape of the crystal microcavities during preparation. The trapezoidal micro-disk cavity of magnesium fluoride crystal with high quality factor was fabricated by preforming, rough grinding, rough polishing and fine polishing. The surface roughness of magnesium fluoride crystal after precision polishing was characterized to be 2. 84 nm using a white light interferometer. By setting up a taper fiber and crystal microcavity coupling testing system, the quality factor of the prepared crystal microcavity was measured to be 4. 55 × 10 at 1 550 nm by the optical cavity ring-down method.

AB - Based on a linear motor, a high precision scale and a mechanical feedback unit, a precision automatic grinding and polishing system was developed. The system enabled accurately control the size, thickness and shape of the crystal microcavities during preparation. The trapezoidal micro-disk cavity of magnesium fluoride crystal with high quality factor was fabricated by preforming, rough grinding, rough polishing and fine polishing. The surface roughness of magnesium fluoride crystal after precision polishing was characterized to be 2. 84 nm using a white light interferometer. By setting up a taper fiber and crystal microcavity coupling testing system, the quality factor of the prepared crystal microcavity was measured to be 4. 55 × 10 at 1 550 nm by the optical cavity ring-down method.

KW - MgFcrystal

KW - high quality factor

KW - metrology

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KW - precision polishing

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高品质因子氟化镁晶体微腔制备与测试

Abstract

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