镜 片 面 形 误 差 与 法 珀 标 准 具 性 能 指 标 的 关 系

To achieve deterministic control of surface figure errors in the fabrication of Fabry-Pérot etalon mirrors，this study thoroughly investigated the relationship between mirror surface figure errors and the performance of etalons. A theoretical model was established to analyze the impact of surface figure errors on the transmission spectrum of the etalon，quantitatively revealing the effects of different surface profiles on key performance parameters，thereby optimizing manufacturing processes and surface control parameters. The research showed that the mean value of surface figure errors had a strong linear correlation with the central wavelength shift，with a sensitivity coefficient of 1. 65 pm/nm that was theoretically derived. The peak-to-valley value of surface figure errors affected the spectral linewidth broadening and peak transmittance attenuation. Within the region where the peak-to-valley value was less than λ/40（15. 8 nm），both linewidth and peak transmittance gradually converged. To validate the theoretical model，a transmission spectrum test system with picometer-level accuracy was constructed. Through qualitative validation via clear aperture testing and quantitative analysis of surface figure errors，it was determined that the surface uniformity of the central plate exerted a greater influence on etalon performance than that of the edge plates. A critical surface figure error control threshold satisfying the performance specifications was established，guiding etalon fabrication experiments. Results demonstrate that for a 30 mm-diameter etalon with the peak-to-valley value controlled within 10 nm，the peak transmittance reaches 98. 63%，achieving narrowband filtering with a bandwidth of 32. 8 pm at the central wavelength of 532. 199 nm，which approaches the theoretical design limit. These conclusions hold significant application value for manufacturing high-precision etalons with high transmittance，narrow bandwidth，and picometer-level central wavelength stability.