激 光 差 动 对 准 的 动 态 角 高 精 度 光 学 测 量 系 统

To address the degradation of alignment measurement accuracy caused by the difficulty in sup⁃ pressing optical aberrations in dynamic angle measurement systems，this paper proposed a high-precision optical measurement technique featuring dynamic aberration suppression based on the principle of laser dif⁃ ferential alignment. A differential alignment mathematical model incorporating aberration factors was es⁃ tablished to thoroughly analyze the impact of aberrations on the energy distribution of the detection spot and the zero-point positioning of the differential signal. This analysis facilitated the derivation of a quantita⁃ tive relationship between wavefront aberration and angular measurement sensitivity. Subsequently，a long-focal-length catadioptric optical structure alongside even aspheric surfaces was employed to effectively sup⁃ press both on-axis and off-axis residual aberrations，thereby enhancing the angular measurement accuracy. Theoretical analysis and preliminary experiments demonstrate that the proposed technique can effectively suppress optical aberrations. Across the full field of view（FOV），the root-mean-square（RMS）spot radii are all smaller than the Airy disk radius，the wavefront RMS error is less than 0. 0424λ，and the modula⁃ tion transfer function（MTF）approaches the diffraction limit. The alignment measurement repeatability of the proposed system reaches 0. 027 arcseconds，which is 41% higher than that of the widely adopted EL⁃ COMAT^®3000 autocollimator，and the maximum alignment measurement deviation of this system is only 0. 085 arcseconds. This study provides a reliable technical pathway for high-precision dynamic angle mea⁃ surement.