激光聚变靶丸内表面轮廓测量系统的研制

Considering the urgent demand for high-precision and nondestructive measurements of a Inertial Confinement Fusion (ICF) capsule, an inner-surface profile measurement system for an ICF capsule was developed in this study. First, the system used a Least Square Circle (LSC) algorithm to calculate the capsule's eccentricity and adjusts it automatically and quickly using the eccentricity adjustment table. The system then controlled via software an air-bearing shaft to drive the capsule rotation, and it used the zero-crossing point of the axial response curve of a laser differential confocal sensor and a ray tracing algorithm to calculate the geometric position of each sampling point on the capsule's inner-surface profile. Finally, the roundness value of the inner profile was evaluated using LSC. Experimental results show that the eccentricity adjustment time can reach 22 s, and the inner profile measurement time can reach 10, 20, and 40 s, which correspond to the sampling points of 1 024, 2 048, and 4 096, respectively. In addition, the standard deviation of the inner profile roundness is shown to be as high as 19 nm (1 024 points). The system realizes an automatic rapid adjustment of the capsule's eccentricity and a high-precision, nondestructive, rapid, and automatic measurement of the capsule's inner profile.