显微热成像系统微扫描误差修正技术

A microscope thermal imaging system can be used for microscopic observation of the temperature distribution of an object. We develop an optical micro-scanning microscope thermal imaging system, but there is micro-scanning system error caused by mechanical vibration and machining error, so the micro-displacement position of the four low-resolution images collected by the micro-scanning system is not standard square. The quality of reconstructed image obtained by the direct interpolation for these erroneous images is reduced, so the error of microscanning system should be reduced. Based on the micro-scanning principle and image interpolation method, we propose a micro-scanning error correction technique to obtain standard 2 X 2 micro-scanning images from nonstandard 2X2 micro-scanning images. The simulation and experimental results show that the proposed technique can effectively reduce micro-scanning error and improve the spatial resolution of optical micro-scanning microscope thermal imaging system. The proposed technique can also be applied to other photoelectric imaging systems to improve the spatial resolution of system.