基 于 镜 像 重 构 的 差 动 共 焦 快 速 曲 面 测 量 方 法

In response to the difficulty of balancing accuracy and efficiency in measuring complex surfaces using traditional differential confocal methods, a proposes a differential confocal rapid surface measurement method based on mirror reconstruction is proposed. Firstly, the surface to be measured is scanned in a pilot manner, and the curve mirror reconstruction is carried out using the symmetry of the confocal curve about the zero point to reduce the scanning stroke and improve measurement efficiency; Perform precise scanning based on the zero crossing point of the differential confocal curve to accurately correspond to the characteristics of the feature points of the measured surface, ensuring high-precision focusing of the surface. This method does not require complex hardware modifications and breaks through the dependence on linear intervals during measurement. Through experimental verification, the RMS value of the surface shape results measured by this method is 13.8nm, ensuring measurement accuracy and approaching the main characteristic distribution of surface errors measured by traditional methods. The measurement efficiency is improved by more than twice that of traditional methods, providing a new and effective approach for rapid and precise measurement of complex surfaces.