基于矢量波像差理论的两反系统装配失调解算方法

This study proposes a method to solve the assembly misalignment of two-reverse systems based on the three-level aberration theory in vector wave aberration theory. The proposed method uses the wavefront aberration coefficient of the axial field of view to establish a model for the misalignment solution. Then, the interval error is solved based on the spherical aberration coefficient. The eccentricity and inclination error are solved based on the coma error and astigmatism coefficient, which considerably improves the accuracy and efficiency of the solution. Using a two-reverse optical system as an example, the alignment is simulated based on the Zemax optical design software, the disorder aberration coefficient of axial field of view is reduced to 10⁷ orders of magnitude, the misadjustment error correction is reduced to 10⁵ orders of magnitude, and good alignment effect is achieved. The model is used to guide the alignment of a two-reverse system,so that the calculating precision and the alignment accuracy meet the requirements. The Zemax simulation and practical results demonstrate that the proposed method functions correctly.