基于大面积TFT和PVDF薄膜的表面形貌无损探测技术

Fei Shang; Xiao Ran Hu; Qian Zhang; Shuai Liu; Yong Xiang

doi:10.12178/1001-0548.2019220

基于大面积TFT和PVDF薄膜的表面形貌无损探测技术

Translated title of the contribution: Nondestructive Detection of Surface Morphology Based on Large-Area TFT and PVDF Films

Fei Shang, Xiao Ran Hu, Qian Zhang, Shuai Liu, Yong Xiang^*

^*Corresponding author for this work

University of Electronic Science and Technology of China

Research output: Contribution to journal › Article › peer-review

Abstract

Aiming at nondestructive detection of the surface morphology of objects, a method based on large-area thin-film transistor (TFT) arrays and poly(vinglidene) fluoride (PVDF) films was developed, which can cover a large area and different shapes while is also portable and highly accurate. This method applies the TFT array, which has been widely used in the semiconductor display field, to the sensor applications. The sensor combined with TFT arrays utilizes the principle of capacitive sensor to accurately detect the surface topography, which can accurately locate micron-level surface defects with a resolution of 50 μm.

Translated title of the contribution	Nondestructive Detection of Surface Morphology Based on Large-Area TFT and PVDF Films
Original language	Chinese (Traditional)
Pages (from-to)	287-290
Number of pages	4
Journal	Dianzi Keji Daxue Xuebao/Journal of the University of Electronic Science and Technology of China
Volume	49
Issue number	2
DOIs	https://doi.org/10.12178/1001-0548.2019220
Publication status	Published - 30 Mar 2020
Externally published	Yes

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@article{a4384ebab0e042b084c395d6eebfc22c,

title = "基于大面积TFT和PVDF薄膜的表面形貌无损探测技术",

abstract = "Aiming at nondestructive detection of the surface morphology of objects, a method based on large-area thin-film transistor (TFT) arrays and poly(vinglidene) fluoride (PVDF) films was developed, which can cover a large area and different shapes while is also portable and highly accurate. This method applies the TFT array, which has been widely used in the semiconductor display field, to the sensor applications. The sensor combined with TFT arrays utilizes the principle of capacitive sensor to accurately detect the surface topography, which can accurately locate micron-level surface defects with a resolution of 50 μm.",

keywords = "PVDF, Sensor, Surface topography, TFT",

author = "Fei Shang and Hu, {Xiao Ran} and Qian Zhang and Shuai Liu and Yong Xiang",

year = "2020",

month = mar,

day = "30",

doi = "10.12178/1001-0548.2019220",

language = "繁体中文",

volume = "49",

pages = "287--290",

journal = "Dianzi Keji Daxue Xuebao/Journal of the University of Electronic Science and Technology of China",

issn = "1001-0548",

publisher = "University of Electronic Science and Technology of China",

number = "2",

}

TY - JOUR

T1 - 基于大面积TFT和PVDF薄膜的表面形貌无损探测技术

AU - Shang, Fei

AU - Hu, Xiao Ran

AU - Zhang, Qian

AU - Liu, Shuai

AU - Xiang, Yong

PY - 2020/3/30

Y1 - 2020/3/30

N2 - Aiming at nondestructive detection of the surface morphology of objects, a method based on large-area thin-film transistor (TFT) arrays and poly(vinglidene) fluoride (PVDF) films was developed, which can cover a large area and different shapes while is also portable and highly accurate. This method applies the TFT array, which has been widely used in the semiconductor display field, to the sensor applications. The sensor combined with TFT arrays utilizes the principle of capacitive sensor to accurately detect the surface topography, which can accurately locate micron-level surface defects with a resolution of 50 μm.

AB - Aiming at nondestructive detection of the surface morphology of objects, a method based on large-area thin-film transistor (TFT) arrays and poly(vinglidene) fluoride (PVDF) films was developed, which can cover a large area and different shapes while is also portable and highly accurate. This method applies the TFT array, which has been widely used in the semiconductor display field, to the sensor applications. The sensor combined with TFT arrays utilizes the principle of capacitive sensor to accurately detect the surface topography, which can accurately locate micron-level surface defects with a resolution of 50 μm.

KW - PVDF

KW - Sensor

KW - Surface topography

KW - TFT

UR - http://www.scopus.com/inward/record.url?scp=85083668450&partnerID=8YFLogxK

U2 - 10.12178/1001-0548.2019220

DO - 10.12178/1001-0548.2019220

M3 - 文章

AN - SCOPUS:85083668450

SN - 1001-0548

VL - 49

SP - 287

EP - 290

JO - Dianzi Keji Daxue Xuebao/Journal of the University of Electronic Science and Technology of China

JF - Dianzi Keji Daxue Xuebao/Journal of the University of Electronic Science and Technology of China

IS - 2

ER -

基于大面积TFT和PVDF薄膜的表面形貌无损探测技术

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