加工残余应力对石英摆片初始挠度的影响

To investigate the mechanism by which processing residual stress affects the initial deflection of the quartz pendulous and thereby improve the bias and long-term stability of accelerometers, this study first detects the residual stress in the full technological chain of quartz pendulous processing. Based on the measured data, a quantitative mathematical relationship is constructed between the residual stress in the flexible beam and structural deformation, and the influence law of residual stress in the flexible beam on the initial deflection of the quartz pendulous is revealed through finite element simulation. The results show that the thermal stress generated by laser ablation and the structural stress caused by cross-sectional mutation due to acid etching are the main sources of residual stress. When the amplitude of the residual stress gradient at the root of the flexible beam ranges from 0.1 MPa to 0.6 MPa, it can induce an initial deflection of 2.52 μm to 15.13 μm in the quartz pendulous. This study clarifies the influence mechanism of residual stress on the initial deflection of quartz pendulous and the zero-bias error of accelerometers, providing a theoretical basis for optimizing processing technology and improving the output stability of accelerometers.