临近空间高速飞行器光纤压力测量传感器

The development of a high-precision optical fiber pressure measurement sensor for hypersonic vehicles in near space can effectively improve the measurement accuracy of hypersonic vehicles flight height, improve its control stability, and provide support for accelerating the development of hypersonic flight technology. A hypersonic vacuum pressure sensor in near space is developed using MEMS fiber optic sensor technology. The naked sensors 1#, 2# and 3# without package protection, and the sensors 4# and 5# with package protection are respectively raised and reduced voltage tests, and the vacuum pressure measurement in near space is realized in the range of 100~2000 Pa. The test results show that all 5 sensors have better cavity length-pressure sensitivity and fitting coefficient. The fitting coefficients of packaged sensors 4# and 5# are close to those of unpackaged naked sensors 1#, 2# and 3#, indicating that secondary packaging does not change the performance of the sensor. A summary and suggestion of the existing research are given, which have reference value and popularization significance for the research of hypersonic vehicles vacuum measurement.