三 轴 光 纤 陀 螺 用 低 损 耗 氮 化 硅 光 引 擎 芯 片

The miniaturization of fiber-optic gyroscopes is constrained by the relatively high insertion loss—a key performance-limiting factor—of integrated photonic chips. This paper introduces a novel triaxial photonic-integrated-gyroscope chip architecture incorporating on-chip polarization rotators. This architecture enables non-working-to-primary mode conversion within waveguides, thereby avoiding the inherent 3 dB loss associated with polarization selectivity in conventional designs. The chip integrates facet couplers and multistage beam splitters that facilitate efficient coupling among the light source,fiber coils,and detector arrays. Simulation results obtained using Lumerical FDTD demonstrate that the device exhibits an insertion loss and extinction ratio of less than −5 dB and greater than 19 dB,respectively,with an overall footprint smaller than 0. 5 mm × 0. 9 mm. The proposed chip exhibits outstanding low-loss performance,offering a promising pathway toward the development of high-performance integrated fiber-optic gyroscopes.