TY - GEN
T1 - Terahertz Devices with EMXT Structure Fabricated by MEMS
AU - Yang, Shengjie
AU - Lu, Hongda
AU - Liu, Zhipeng
AU - Liu, Yong
AU - Li, Bin
AU - Lv, Xin
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/12/5
Y1 - 2018/12/5
N2 - Due to the micro-dimension of terahertz devices and antennas, it requires more stringent processing technology. Micro-Electro-Mechanical Systems (MEMS) used to fabricate terahertz functional devices and antennas is a good choice for the high accuracy, good consistence and low cost. In this paper, one approach to obtain antennas and passive devices in terahertz band is proposed, which based on electromagnetic crystal structure and MEMS technology. The band-pass filter, 90° bend waveguide and H-plane horn antenna operating at terahertz band are presented as examples. All of them have good agreement between simulation and measurement.
AB - Due to the micro-dimension of terahertz devices and antennas, it requires more stringent processing technology. Micro-Electro-Mechanical Systems (MEMS) used to fabricate terahertz functional devices and antennas is a good choice for the high accuracy, good consistence and low cost. In this paper, one approach to obtain antennas and passive devices in terahertz band is proposed, which based on electromagnetic crystal structure and MEMS technology. The band-pass filter, 90° bend waveguide and H-plane horn antenna operating at terahertz band are presented as examples. All of them have good agreement between simulation and measurement.
UR - http://www.scopus.com/inward/record.url?scp=85060235718&partnerID=8YFLogxK
U2 - 10.1109/ICMMT.2018.8563681
DO - 10.1109/ICMMT.2018.8563681
M3 - Conference contribution
AN - SCOPUS:85060235718
T3 - 2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings
BT - 2018 International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 10th International Conference on Microwave and Millimeter Wave Technology, ICMMT 2018
Y2 - 6 May 2018 through 9 May 2018
ER -