Technologies of performance improvement for platinum silicide infrared focal plane array

Platinum silicide infrared focal plane array is characterized by several advantages such as wide spectral range, large array, good uniformity, high time stability and low cost. It shows application potential in multispectral/wide-spectrum imaging, laser detection, astronomical observation and medical monitor. However, 100mK's sensitivity(NETD) is the main limitation on wide application. The technologies of improving performance of platinum silicide infrared detector were summarized. Optical cavity structure, PtSi/porous Si schottky barrier, doping-spike P⁺ and suitable PtSi film thickness were effective measures to increase quantum efficiency. Porous silicon structure improved quantum efficiency as much as 27% at 4 μm wavelength. Comparing with interline transfer CCD, the fill factor of the FPAs was raised up to 50%-80% using charge sweep device, meander channel CCD or hybrid schottky structure. In addition, microlens array was the most efficient method to augment the fill factor higher than 85%.